Abstract: According to an exemplary embodiment, a method of forming a vertical device is provided. The method includes: providing a protrusion over a substrate; forming an etch stop layer over the protrusion; laterally etching a sidewall of the etch stop layer; forming an insulating layer over the etch stop layer; forming a film layer over the insulating layer and the etch stop layer; performing chemical mechanical polishing on the film layer and exposing the etch stop layer; etching a portion of the etch stop layer to expose a top surface of the protrusion; forming an oxide layer over the protrusion and the film layer; and performing chemical mechanical polishing on the oxide layer and exposing the film layer.

Abstract: According to an exemplary embodiment, a method of forming a vertical device is provided. The method includes: providing a protrusion over a substrate; forming an etch stop layer over the protrusion; laterally etching a sidewall of the etch stop layer; forming an insulating layer over the etch stop layer; forming a film layer over the insulating layer and the etch stop layer; performing chemical mechanical polishing on the film layer and exposing the etch stop layer; etching a portion of the etch stop layer to expose a top surface of the protrusion; forming an oxide layer over the protrusion and the film layer; and performing chemical mechanical polishing on the oxide layer and exposing the film layer.

Abstract: A charging system for charging an electric vehicle includes a charging device and a mobile power supplying equipment. The charging device includes a charging base, a power receiving terminal disposed on the charging base, and a charging gun electrically connected to the power receiving terminal and configured to charge the electric vehicle. The mobile power supplying equipment includes a power module, a docking device, and a power supplying terminal disposed on the docking device and electrically connected to the power module. When the mobile power supplying equipment moves to a position within a predetermined range of the charging base, the docking device is configured to adjust the power supplying terminal to make the power supplying terminal detachably dock with the power receiving terminal, and the power module then outputs power to the charging gun for the charging gun charging the electric vehicle.