Patents by Inventor Li-Wei Chou

Li-Wei Chou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11948971
    Abstract: A method includes forming isolations extending into a semiconductor substrate, recessing the isolation regions, wherein a semiconductor region between the isolation regions forms a semiconductor fin, forming a first dielectric layer on the isolation regions and the semiconductor fin, forming a second dielectric layer over the first dielectric layer, planarizing the second dielectric layer and the first dielectric layer, and recessing the first dielectric layer. A portion of the second dielectric layer protrudes higher than remaining portions of the first dielectric layer to form a protruding dielectric fin. A portion of the semiconductor fin protrudes higher than the remaining portions of the first dielectric layer to form a protruding semiconductor fin. A portion of the protruding semiconductor fin is recessed to form a recess, from which an epitaxy semiconductor region is grown. The epitaxy semiconductor region expands laterally to contact a sidewall of the protruding dielectric fin.
    Type: Grant
    Filed: August 10, 2021
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jeng-Wei Yu, Tsz-Mei Kwok, Tsung-Hsi Yang, Li-Wei Chou, Ming-Hua Yu
  • Patent number: 11908742
    Abstract: A semiconductor device and method of forming the same is disclosed. The semiconductor device includes a semiconductor substrate, a first fin and a second fin extending from the semiconductor substrate, a first lower semiconductor feature over the first fin, a second lower semiconductor feature over the second fin. Each of the first and second lower semiconductor features includes a top surface bending downward towards the semiconductor substrate in a cross-sectional plane perpendicular to a lengthwise direction of the first and second fins. The semiconductor device also includes an upper semiconductor feature over and in physical contact with the first and second lower semiconductor features, and a dielectric layer on sidewalls of the first and second lower semiconductor features.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jing Lee, Jeng-Wei Yu, Li-Wei Chou, Tsz-Mei Kwok, Ming-Hua Yu
  • Publication number: 20230378181
    Abstract: A semiconductor device includes a substrate, a semiconductor feature protruding from the substrate and extending lengthwise in a first direction, an epitaxial feature directly above the semiconductor feature, and a gate stack adjacent the epitaxial feature. The epitaxial feature comprises a lower portion and an upper portion over the lower portion. The upper portion extends partially through the lower portion in a cross section perpendicular to the first direction. A topmost surface of the upper portion is substantially flat.
    Type: Application
    Filed: July 29, 2023
    Publication date: November 23, 2023
    Inventors: Yi-Jing Lee, Li-Wei Chou, Ming-Hua Yu
  • Patent number: 11769771
    Abstract: A semiconductor device and method of forming the same are disclosed. The semiconductor device includes a substrate, an isolation structure over the substrate, a fin extending from the substrate, and an epitaxial feature over the fin. The epitaxial feature comprises a lower portion and an upper portion. The lower portion extends from the fin and extends above the isolation structure. The upper portion is over the lower portion. The upper portion extends partially through the lower portion in a cross section perpendicular to a lengthwise direction of the fin.
    Type: Grant
    Filed: March 14, 2022
    Date of Patent: September 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Jing Lee, Li-Wei Chou, Ming-Hua Yu
  • Publication number: 20230294382
    Abstract: A functional laminated glass article includes: a backer substrate; a flexible glass substrate comprising a thickness of no greater than 300 ?m, and laminated to the backer substrate with an adhesive; a plurality of conductive traces disposed on one or both of the backer substrate and the flexible glass substrate; and a plurality of electronic device elements disposed between the backer substrate and the flexible glass substrate and in contact with the plurality of conductive traces. Further, the adhesive encapsulates the conductive traces and the electronic device elements between the backer substrate and the flexible glass substrate.
    Type: Application
    Filed: June 25, 2021
    Publication date: September 21, 2023
    Inventors: Li-Wei Chou, Sean Matthew Garner, Jen-Chieh Lin, Pei-Lien Tseng
  • Publication number: 20220293601
    Abstract: A semiconductor device and method of forming the same are disclosed. The semiconductor device includes a substrate, an isolation structure over the substrate, a fin extending from the substrate, and an epitaxial feature over the fin. The epitaxial feature comprises a lower portion and an upper portion. The lower portion extends from the fin and extends above the isolation structure. The upper portion is over the lower portion. The upper portion extends partially through the lower portion in a cross section perpendicular to a lengthwise direction of the fin.
    Type: Application
    Filed: March 14, 2022
    Publication date: September 15, 2022
    Inventors: Yi-Jing Lee, Li-Wei Chou, Ming-Hua Yu
  • Publication number: 20220267196
    Abstract: A method is described herein of making a textured glass article, the method includes: etching an initial primary surface of a glass substrate having a thickness with a hydrofluoric acid-free etchant having a pH of about 3 or less; and removing the etchant from the glass substrate, such that the etching is conducted from above ambient temperature to about 100° C. to form a textured region that is defined by a primary surface of the substrate and comprises a sparkle of 2% or less, and the etching comprises a plurality of batch cycles.
    Type: Application
    Filed: August 6, 2020
    Publication date: August 25, 2022
    Inventors: Li-Wei Chou, Jiangwei Feng, Jhih-Wei Liang
  • Patent number: 11276693
    Abstract: A semiconductor device and method of forming the same are disclosed. The method of forming a semiconductor device includes providing a substrate, an isolation structure over the substrate, and at least two fins extending from the substrate and through the isolation structure; etching the at least two fins, thereby forming at least two trenches; growing first epitaxial features in the at least two trenches; growing second epitaxial features over the first epitaxial features in a first growth condition; and after the second epitaxial features reach a target critical dimension, growing the second epitaxial features in a second growth condition different from the first growth condition.
    Type: Grant
    Filed: July 27, 2018
    Date of Patent: March 15, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jing Lee, Li-Wei Chou, Ming-Hua Yu
  • Publication number: 20210384120
    Abstract: An embodiment semiconductor package includes a bare semiconductor chip, a packaged semiconductor chip adjacent the bare semiconductor chip, and a redistribution structure bonded to the bare semiconductor chip and the packaged semiconductor chip. The redistribution structure includes a first redistribution layer having a first thickness; a second redistribution layer having a second thickness; and a third redistribution layer between the first redistribution layer and the second redistribution layer. The third redistribution layer has a third thickness greater than the first thickness and the second thickness. The package further includes an underfill disposed between the bare semiconductor chip and the redistribution structure and a molding compound encapsulating the bare semiconductor chip, the packaged semiconductor chip, and the underfill.
    Type: Application
    Filed: August 23, 2021
    Publication date: December 9, 2021
    Inventors: Chung-Shi Liu, Chien-Hsun Lee, Jiun Yi Wu, Hao-Cheng Hou, Hung-Jen Lin, Jung Wei Cheng, Tsung-Ding Wang, Yu-Min Liang, Li-Wei Chou
  • Publication number: 20210376073
    Abstract: A method includes forming isolations extending into a semiconductor substrate, recessing the isolation regions, wherein a semiconductor region between the isolation regions forms a semiconductor fin, forming a first dielectric layer on the isolation regions and the semiconductor fin, forming a second dielectric layer over the first dielectric layer, planarizing the second dielectric layer and the first dielectric layer, and recessing the first dielectric layer. A portion of the second dielectric layer protrudes higher than remaining portions of the first dielectric layer to form a protruding dielectric fin. A portion of the semiconductor fin protrudes higher than the remaining portions of the first dielectric layer to form a protruding semiconductor fin. A portion of the protruding semiconductor fin is recessed to form a recess, from which an epitaxy semiconductor region is grown. The epitaxy semiconductor region expands laterally to contact a sidewall of the protruding dielectric fin.
    Type: Application
    Filed: August 10, 2021
    Publication date: December 2, 2021
    Inventors: Jeng-Wei Yu, Tsz-Mei Kwok, Tsung-Hsi Yang, Li-Wei Chou, Ming-Hua Yu
  • Publication number: 20210313230
    Abstract: A semiconductor device and method of forming the same is disclosed. The semiconductor device includes a semiconductor substrate, a first fin and a second fin extending from the semiconductor substrate, a first lower semiconductor feature over the first fin, a second lower semiconductor feature over the second fin. Each of the first and second lower semiconductor features includes a top surface bending downward towards the semiconductor substrate in a cross-sectional plane perpendicular to a lengthwise direction of the first and second fins. The semiconductor device also includes an upper semiconductor feature over and in physical contact with the first and second lower semiconductor features, and a dielectric layer on sidewalls of the first and second lower semiconductor features.
    Type: Application
    Filed: June 14, 2021
    Publication date: October 7, 2021
    Inventors: Yi-Jing Lee, Jeng-Wei Yu, Li-Wei Chou, Tsz-Mei Kwok, Ming-Hua Yu
  • Patent number: 11101209
    Abstract: An embodiment semiconductor package includes a bare semiconductor chip, a packaged semiconductor chip adjacent the bare semiconductor chip, and a redistribution structure bonded to the bare semiconductor chip and the packaged semiconductor chip. The redistribution structure includes a first redistribution layer having a first thickness; a second redistribution layer having a second thickness; and a third redistribution layer between the first redistribution layer and the second redistribution layer. The third redistribution layer has a third thickness greater than the first thickness and the second thickness. The package further includes an underfill disposed between the bare semiconductor chip and the redistribution structure and a molding compound encapsulating the bare semiconductor chip, the packaged semiconductor chip, and the underfill.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: August 24, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Shi Liu, Chien-Hsun Lee, Jiun Yi Wu, Hao-Cheng Hou, Hung-Jen Lin, Jung Wei Cheng, Tsung-Ding Wang, Yu-Min Liang, Li-Wei Chou
  • Patent number: 11101347
    Abstract: A method includes forming isolations extending into a semiconductor substrate, recessing the isolation regions, wherein a semiconductor region between the isolation regions forms a semiconductor fin, forming a first dielectric layer on the isolation regions and the semiconductor fin, forming a second dielectric layer over the first dielectric layer, planarizing the second dielectric layer and the first dielectric layer, and recessing the first dielectric layer. A portion of the second dielectric layer protrudes higher than remaining portions of the first dielectric layer to form a protruding dielectric fin. A portion of the semiconductor fin protrudes higher than the remaining portions of the first dielectric layer to form a protruding semiconductor fin. A portion of the protruding semiconductor fin is recessed to form a recess, from which an epitaxy semiconductor region is grown. The epitaxy semiconductor region expands laterally to contact a sidewall of the protruding dielectric fin.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: August 24, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jeng-Wei Yu, Tsz-Mei Kwok, Tsung-Hsi Yang, Li-Wei Chou, Ming-Hua Yu
  • Patent number: 11037826
    Abstract: A semiconductor device and method of forming the same is disclosed. The semiconductor device includes a semiconductor substrate, a first fin and a second fin extending from the semiconductor substrate, a first lower semiconductor feature directly over the first fin, and a second lower semiconductor feature directly over the second fin. Each of the first and second lower semiconductor features includes a top surface bending downward towards the semiconductor substrate. The semiconductor also further includes an upper semiconductor feature directly over and in physical contact with the first and second lower semiconductor features. The semiconductor device further includes a dielectric layer on sidewalls of the first and second lower semiconductor features.
    Type: Grant
    Filed: January 27, 2020
    Date of Patent: June 15, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jing Lee, Jeng-Wei Yu, Li-Wei Chou, Tsz-Mei Kwok, Ming-Hua Yu
  • Patent number: 10879128
    Abstract: A semiconductor device includes a first semiconductor fin extending from a substrate, a first dielectric fin extending from the substrate adjacent a first side of the first semiconductor fin and a second dielectric fin extending from the substrate adjacent a second side of the first semiconductor fin, a first gate stack over and along sidewalls of the first semiconductor fin, the first dielectric fin, and the second dielectric fin, a first epitaxial source/drain region in the first semiconductor fin and extending from the first dielectric fin to the second dielectric fin, and an air gap between the first epitaxial source/drain region and the substrate, the air gap extending between the first dielectric fin and the second dielectric fin.
    Type: Grant
    Filed: August 2, 2019
    Date of Patent: December 29, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsz-Mei Kwok, Tsung-Hsi Yang, Jeng-Wei Yu, Li-Wei Chou, Ming-Hua Yu, Chii-Horng Li
  • Publication number: 20200176560
    Abstract: A method includes forming isolations extending into a semiconductor substrate, recessing the isolation regions, wherein a semiconductor region between the isolation regions forms a semiconductor fin, forming a first dielectric layer on the isolation regions and the semiconductor fin, forming a second dielectric layer over the first dielectric layer, planarizing the second dielectric layer and the first dielectric layer, and recessing the first dielectric layer. A portion of the second dielectric layer protrudes higher than remaining portions of the first dielectric layer to form a protruding dielectric fin. A portion of the semiconductor fin protrudes higher than the remaining portions of the first dielectric layer to form a protruding semiconductor fin. A portion of the protruding semiconductor fin is recessed to form a recess, from which an epitaxy semiconductor region is grown. The epitaxy semiconductor region expands laterally to contact a sidewall of the protruding dielectric fin.
    Type: Application
    Filed: July 1, 2019
    Publication date: June 4, 2020
    Inventors: Jeng-Wei Yu, Tsz-Mei Kwok, Tsung-Hsi Yang, Li-Wei Chou, Ming-Hua Yu
  • Publication number: 20200161185
    Abstract: A semiconductor device and method of forming the same is disclosed. The semiconductor device includes a semiconductor substrate, a first fin and a second fin extending from the semiconductor substrate, a first lower semiconductor feature directly over the first fin, and a second lower semiconductor feature directly over the second fin. Each of the first and second lower semiconductor features includes a top surface bending downward towards the semiconductor substrate. The semiconductor also further includes an upper semiconductor feature directly over and in physical contact with the first and second lower semiconductor features. The semiconductor device further includes a dielectric layer on sidewalls of the first and second lower semiconductor features.
    Type: Application
    Filed: January 27, 2020
    Publication date: May 21, 2020
    Inventors: Yi-Jing Lee, Jeng-Wei Yu, Li-Wei Chou, Tsz-Mei Kwok, Ming-Hua Yu
  • Publication number: 20200075423
    Abstract: A semiconductor device includes a first semiconductor fin extending from a substrate, a first dielectric fin extending from the substrate adjacent a first side of the first semiconductor fin and a second dielectric fin extending from the substrate adjacent a second side of the first semiconductor fin, a first gate stack over and along sidewalls of the first semiconductor fin, the first dielectric fin, and the second dielectric fin, a first epitaxial source/drain region in the first semiconductor fin and extending from the first dielectric fin to the second dielectric fin, and an air gap between the first epitaxial source/drain region and the substrate, the air gap extending between the first dielectric fin and the second dielectric fin.
    Type: Application
    Filed: August 2, 2019
    Publication date: March 5, 2020
    Inventors: Tsz-Mei Kwok, Tsung-Hsi Yang, Jeng-Wei Yu, Li-Wei Chou, Ming-Hua Yu, Chii-Horng Li
  • Patent number: 10546784
    Abstract: A semiconductor device and method of forming the same is disclosed. The semiconductor device includes a substrate, two semiconductor fins over the substrate, and a semiconductor feature over the two semiconductor fins. The semiconductor feature comprises two lower portions and one upper portion. The two lower portions are directly over the two semiconductor fins respectively. The upper portion is over the two lower portions. A bottom surface of the upper portion has an arc-like cross-sectional shape.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: January 28, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jing Lee, Jeng-Wei Yu, Li-Wei Chou, Tsz-Mei Kwok, Ming-Hua Yu
  • Patent number: 10490552
    Abstract: A semiconductor device includes a substrate, an isolation structure over the substrate, two fins over the substrate and protruding out of the isolation structure, and an epitaxial feature over the two fins. The epitaxial feature includes two lower portions and one upper portion. The two lower portions are over the two fins respectively. The upper portion is over the two lower portions and connects the two lower portions. The upper portion has a different dopant concentration than the two lower portions. A top surface of the upper portion is substantially flat.
    Type: Grant
    Filed: September 27, 2016
    Date of Patent: November 26, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yi-Jing Lee, Li-Wei Chou, Ming-Hua Yu