Abstract: A method of forming a structure of 3D NAND memory device, including steps of forming a first stack layer on a substrate, forming a first channel hole extending through the first stack layer, forming a block layer on a surface of the first stack layer and the first channel hole, forming a sacrificial layer in the first channel hole, forming a second stack layer on the first stack layer and the sacrificial layer, performing a first etch process to form a second channel hole extending through the second stack layer and at least partially overlapping the first channel hole and to remove the sacrificial layer in the first channel hole, removing the block layer exposed from the second channel hole, and forming a function layer on a surface of the first channel hole and the second channel hole.

Abstract: A method of forming a structure of 3D NAND memory device, including steps of forming a first stack layer on a substrate, forming a first channel hole extending through the first stack layer, forming a block layer on a surface of the first stack layer and the first channel hole, forming a sacrificial layer in the first channel hole, forming a second stack layer on the first stack layer and the sacrificial layer, performing a first etch process to form a second channel hole extending through the second stack layer and at least partially overlapping the first channel hole and to remove the sacrificial layer in the first channel hole, removing the block layer exposed from the second channel hole, and forming a function layer on a surface of the first channel hole and the second channel hole.

Abstract: A structure of 3D NAND memory device and manufacturing method are provided. The structure of 3D NAND memory device includes a substrate, a first stack layer on the substrate, a second stack layer on the first stack layer, a block layer between the first stack layer and the second stack layer, and a channel structure extending through the first stack layer, the block layer and the second stack layer, wherein the channel structure comprises a function layer and a channel layer surrounding by the functional layer.

Abstract: A chemical etching apparatus and methods of using are disclosed. An apparatus used for chemical etching includes a bath designed to hold a first liquid. A liquid supply pipe runs along a bottom portion of the bath. The liquid supply pipe has a first plurality of openings along a length of the liquid supply pipe along the bottom portion of the bath. A gas supply pipe runs along the bottom portion of the bath. The gas supply pipe has a second plurality of openings along a length of the gas supply pipe along the bottom portion of the bath. The liquid supply pipe introduces a second liquid into the first liquid via the first plurality of openings and the gas supply pipe introduces a gas into the first liquid via the second plurality of openings.