Patents by Inventor Lia ZHAO

Lia ZHAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NON-SHADOW FRAME PLASMA PROCESSING CHAMBER
    Publication number: 20170335459
    Abstract: Embodiments described herein generally relate to a substrate support assembly. The substrate support assembly includes a support plate and a ceramic layer. The support plate has a top surface. The top surface includes a substrate receiving area configured to support a large area substrate and an outer area located outward of the substrate receiving area.
    Type: Application
    Filed: May 17, 2016
    Publication date: November 23, 2017
    Inventors: Young-jin CHOI, Beom Soo PARK, Dongsuh LEE, William Norman STERLING, Robin L. TINER, Shinichi KURITA, Suhail ANWAR, Soo Young CHOI, Yi CUI, Lia ZHAO, Dapeng WANG