Patents by Inventor Liam J. Quinn

Liam J. Quinn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Group 2 metal precursors for depositing multi-component metal oxide films
    Patent number: 8247617
    Abstract: Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST) films in semiconductor fabrication.
    Type: Grant
    Filed: November 6, 2008
    Date of Patent: August 21, 2012
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Xinjian Lei, Liam J. Quinn, Daniel P. Spence
  • Group 2 Metal Precursors for Depositing Multi-Component Metal Oxide Films
    Publication number: 20090130338
    Abstract: Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST) films in semiconductor fabrication.
    Type: Application
    Filed: November 6, 2008
    Publication date: May 21, 2009
    Applicant: Air Products and Chemicals, Inc.
    Inventors: Xinjian Lei, Liam J. Quinn, Daniel P. Spence
  • Group 2 Metal Precursors For Depositing Multi-Component Metal Oxide Films
    Publication number: 20080286464
    Abstract: Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as potential precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST) films in semiconductor fabrication.
    Type: Application
    Filed: May 1, 2008
    Publication date: November 20, 2008
    Applicant: AIR PRODUCTS AND CHEMICALS, INC.
    Inventors: Xinjian Lei, Liam J. Quinn, Daniel P. Spence