Patents by Inventor Liam Joseph Cunnane

Liam Joseph Cunnane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of deposting a dielectric film
    Publication number: 20040217346
    Abstract: This invention relates to a method of depositing a dielectric film on a substrate surface having metal lines thereon with at least some spacings between 4 &mgr;m and 20 &mgr;m including reacting at least one silane containing gas and at least one of oxygen or an oxygen containing gas in a chamber to form a film on the surface of the substrate within the chamber wherein the chamber pressure is below 850 mT and wherein spaces between the metal lines are at least substantially filled by the film.
    Type: Application
    Filed: January 27, 2004
    Publication date: November 4, 2004
    Inventors: Liam Joseph Cunnane, Knut Beekmann