Abstract: An apparatus for use in the treatment of substrates with a solid particulate material, said apparatus comprising: (a) a housing having mounted therein a rotatably mounted drum (8) having an inner surface and an end wall; and (b) access means for introducing said substrates into said drum, wherein said drum comprises storage means (2) for storage of said solid particulate material and a plurality of flow paths to facilitate flow of said solid particulate material between said storage means and the interior of said drum (8), characterised in that: said drum (8) comprises a dispensing flow path (5) to facilitate flow of said solid particulate material from said storage means (2) to the interior of said drum (8), and a collecting flow path (6) to facilitate flow of said particulate material from the interior of said drum (8) to said storage means (2), wherein said dispensing flow path (5) and said collecting flow path (6) are different flow paths.

Abstract: A baffle for use with a treatment machine wherein the treatment machine is configured to treat substrates in the presence of solid particles and wherein the treatment machine comprises a drum and a door for loading a substrate into the drum. The baffle comprises a tub connector portion connecting the baffle to a tub of the treatment machine. The baffle also comprises a door contacting portion for contacting the door of the treatment machine when in use and the door is in a closed configuration. The baffle also comprises a barrier extending between the tub connector portion and the door contacting portion; and wherein the barrier is inclined so that when in use, solid particles deposited on the barrier are diverted into the drum of the treatment machine. There is also provided a treatment machine comprising the baffle and a method of treating a substrate in said treatment machine.

Abstract: An apparatus for use in the treatment of substrates with a solid particulate material, said apparatus comprising: (a) a housing having mounted therein a rotatably mounted drum (8) having an inner surface and an end wall; and (b) access means for introducing said substrates into said drum, wherein said drum comprises storage means (2) for storage of said solid particulate material and a plurality of flow paths to facilitate flow of said solid particulate material between said storage means and the interior of said drum (8), characterised in that: said drum (8) comprises a dispensing flow path (5) to facilitate flow of said solid particulate material from said storage means (2) to the interior of said drum (8), and a collecting flow path (6) to facilitate flow of said particulate material from the interior of said drum (8) to said storage means (2), wherein said dispensing flow path (5) and said collecting flow path (6) are different flow paths.

Abstract: An apparatus and method are provided for detecting wear in substrate retainers used for chemical mechanical planarization processes. A substrate retainer is provided that is adapted to enable a sensor to detect when the wear edge of the retainer has worn to a critical wear threshold so that the retainer may be replaced prior to failure.