Abstract: A measurement system for detecting deep-hole surface topography based on low-coherence interferometry (LCI), can include a detection part and an autocollimation system. The detection part includes a white light interferometric system, which specifically includes a 1550 nm amplified spontaneous emission (ASE) broadband light source, a first reflector, a first beam splitting prism, a second reflector, and a reference reflector that are arranged in sequence, where a to-be-measured deep-hole and a near-infrared camera are respectively arranged at two sides of the first beam splitting prism, and a conical prism is disposed inside the to-be-measured deep-hole. The autocollimation system is disposed between the to-be-measured deep-hole and the first beam-splitting prism. The autocollimation system includes a 630 nm light source, a dichroic prism, a second beam-splitting prism, a third reflector, and a quadrant detector that are arranged in sequence.

Abstract: A micro inchworm-type piezoelectric-driven rotating joint mechanism includes a U-shaped base, bearing pedestals, bearing brackets, bearing rings, piezoelectric ceramic plates, a rotating shaft, a rotating sleeve and end caps. Every bearing ring is divided into two half-rings which are coupled to the bearing pedestals via two bearing brackets. One end of every piezoelectric ceramic plate is fixed to one bearing pedestal, and the other end thereof is coupled to one bearing ring, so that every piezoelectric ceramic plate stretches and deforms under the driving of voltage for driving the bearing ring to achieve micro motions. Two bearing driving modules are respectively symmetrically mounted at two sides of the U-shaped base, and the rotating shaft is supported on the two bearing rings, so that the stepping motion of the rotating shaft is implemented by controlling the timing sequence of clamping, release and rotation of the two bearing driving modules.

Abstract: Disclosed is a micro inchworm-type piezoelectric-driven rotating joint mechanism, including a U-shaped base, bearing pedestals, bearing brackets, bearing rings, piezoelectric ceramic plates, a rotating shaft, a rotating sleeve and end caps. Every bearing ring is divided into two half-rings which are coupled to the bearing pedestals via a pair of bearing brackets. One end of every piezoelectric ceramic plate is fixed to one bearing pedestal, and the other end thereof is coupled to one bearing ring, so that every piezoelectric ceramic plate stretches and deforms under the driving of voltage for driving the bearing ring to achieve micro motions, such as clamping, releasing and rotating.