Patents by Inventor Liang-Chor Chung

Liang-Chor Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230363287
    Abstract: A method includes forming a memory stack over a substrate. A dielectric layer is deposited to cover the memory stack. An opening is formed in the dielectric layer. The opening does not expose the memory stack. A spin-orbit-torque (SOT) layer is formed in the opening. A free layer is formed over the dielectric layer to interconnect the memory stack and the SOT layer.
    Type: Application
    Filed: July 17, 2023
    Publication date: November 9, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Ya-Jui TSOU, Zong-You LUO, Chee-Wee LIU, Shao-Yu LIN, Liang-Chor CHUNG, Chih-Lin WANG
  • Publication number: 20230360686
    Abstract: A method includes forming bottom conductive lines over a wafer. A first magnetic tunnel junction (MTJ) stack is formed over the bottom conductive lines. Middle conductive lines are formed over the first MTJ stack. A second MTJ stack is formed over the middle conductive lines. Top conductive lines are formed over the second MTJ stack.
    Type: Application
    Filed: July 14, 2023
    Publication date: November 9, 2023
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Zong-You LUO, Ya-Jui TSOU, Chee-Wee LIU, Shao-Yu LIN, Liang-Chor CHUNG, Chih-Lin WANG
  • Patent number: 11778923
    Abstract: A magnetoresistive memory device includes a memory stack, a spin-orbit-torque (SOT) layer, and a free layer. The memory stack includes a pinned layer, a spacer layer over the pinned layer, a reference layer over the spacer layer, and a tunnel barrier layer over the reference layer. The SOT layer has a top surface substantially coplanar with a top surface of the tunnel barrier layer of the memory stack. The free layer interconnects the SOT layer and the tunnel barrier layer.
    Type: Grant
    Filed: November 14, 2021
    Date of Patent: October 3, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Ya-Jui Tsou, Zong-You Luo, Chee-Wee Liu, Shao-Yu Lin, Liang-Chor Chung, Chih-Lin Wang
  • Patent number: 11749328
    Abstract: A method includes forming bottom conductive lines over a wafer. A first magnetic tunnel junction (MTJ) stack is formed over the bottom conductive lines. Middle conductive lines are formed over the first MTJ stack. A second MTJ stack is formed over the middle conductive lines. Top conductive lines are formed over the second MTJ stack.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: September 5, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Zong-You Luo, Ya-Jui Tsou, Chee-Wee Liu, Shao-Yu Lin, Liang-Chor Chung, Chih-Lin Wang
  • Publication number: 20220359372
    Abstract: The present disclosure describes an interconnect structure and a method forming the same. The interconnect structure can include a substrate, a layer of conductive material over the substrate, a metallic capping layer over the layer of conductive material, a layer of insulating material over top and side surfaces of the metallic capping layer, and a layer of trench conductor formed in the layer of insulating material and the metallic capping layer.
    Type: Application
    Filed: July 22, 2022
    Publication date: November 10, 2022
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jason HUANG, Liang-Chor CHUNG, Cheng-Yuan LI
  • Publication number: 20220358980
    Abstract: A method includes forming bottom conductive lines over a wafer. A first magnetic tunnel junction (MTJ) stack is formed over the bottom conductive lines. Middle conductive lines are formed over the first MTJ stack. A second MTJ stack is formed over the middle conductive lines. Top conductive lines are formed over the second MTJ stack.
    Type: Application
    Filed: July 25, 2022
    Publication date: November 10, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Zong-You LUO, Ya-Jui TSOU, Chee-Wee LIU, Shao-Yu LIN, Liang-Chor CHUNG, Chih-Lin WANG
  • Publication number: 20220352043
    Abstract: Test pad structures and methods of forming a test pad are described herein. A method for forming a test pad includes forming a device element over a substrate, depositing a dielectric layer over the device element and the substrate, and etching openings in the dielectric layer to a first depth. Once the openings have been formed, a conductive material is deposited in the openings and followed by a chemical mechanical planarization to form a first grid feature and a panel region of the test pad, the first grid feature extending lengthwise from the panel region to a perimeter of the test pad. Once formed, a probe may be used to contact the panel region of the test pad during a wafer acceptance test (WAT) and/or a process control monitoring (PCM) test of the device element.
    Type: Application
    Filed: July 18, 2022
    Publication date: November 3, 2022
    Inventors: Yao-Te Huang, Liang-Chor Chung
  • Patent number: 11476191
    Abstract: The present disclosure describes an interconnect structure and a method forming the same. The interconnect structure can include a substrate, a layer of conductive material over the substrate, a metallic capping layer over the layer of conductive material, a layer of insulating material over top and side surfaces of the metallic capping layer, and a layer of trench conductor formed in the layer of insulating material and the metallic capping layer.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: October 18, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jason Huang, Liang-Chor Chung, Cheng-Yuan Li
  • Patent number: 11443991
    Abstract: Test pad structures and methods of forming a test pad are described herein. A method for forming a test pad includes forming a device element over a substrate, depositing a dielectric layer over the device element and the substrate, and etching openings in the dielectric layer to a first depth. Once the openings have been formed, a conductive material is deposited in the openings and followed by a chemical mechanical planarization to form a first grid feature and a panel region of the test pad, the first grid feature extending lengthwise from the panel region to a perimeter of the test pad. Once formed, a probe may be used to contact the panel region of the test pad during a wafer acceptance test (WAT) and/or a process control monitoring (PCM) test of the device element.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: September 13, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yao-Te Huang, Liang-Chor Chung
  • Patent number: 11410714
    Abstract: A magnetoresistive memory device includes a plurality of bottom conductive lines, a plurality of top conductive lines, a first memory cell, and a second memory cell. The top conductive lines are over the bottom conductive lines. The first memory cell is between the bottom conductive lines and the top conductive lines and includes a first magnetic tunnel junction (MTJ) stack. The second memory cell is adjacent the first memory cell and between the bottom conductive lines and the top conductive lines. The second memory cell includes a second MTJ stack, and a top surface of the second MTJ stack is higher than a top surface of the first MTJ stack.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: August 9, 2022
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Zong-You Luo, Ya-Jui Tsou, Chee-Wee Liu, Shao-Yu Lin, Liang-Chor Chung, Chih-Lin Wang
  • Publication number: 20220077384
    Abstract: A magnetoresistive memory device includes a memory stack, a spin-orbit-torque (SOT) layer, and a free layer. The memory stack includes a pinned layer, a spacer layer over the pinned layer, a reference layer over the spacer layer, and a tunnel barrier layer over the reference layer. The SOT layer has a top surface substantially coplanar with a top surface of the tunnel barrier layer of the memory stack. The free layer interconnects the SOT layer and the tunnel barrier layer.
    Type: Application
    Filed: November 14, 2021
    Publication date: March 10, 2022
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Ya-Jui TSOU, Zong-You LUO, Chee-Wee LIU, Shao-Yu LIN, Liang-Chor CHUNG, Chih-Lin WANG
  • Publication number: 20210375703
    Abstract: Test pad structures and methods of forming a test pad are described herein. A method for forming a test pad includes forming a device element over a substrate, depositing a dielectric layer over the device element and the substrate, and etching openings in the dielectric layer to a first depth. Once the openings have been formed, a conductive material is deposited in the openings and followed by a chemical mechanical planarization to form a first grid feature and a panel region of the test pad, the first grid feature extending lengthwise from the panel region to a perimeter of the test pad. Once formed, a probe may be used to contact the panel region of the test pad during a wafer acceptance test (WAT) and/or a process control monitoring (PCM) test of the device element.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Yao-Te Huang, Liang-Chor Chung
  • Patent number: 11177430
    Abstract: A magnetoresistive memory device includes a memory stack, a spin-orbit-torque (SOT) layer, and a free layer. The memory stack includes a pinned layer and a reference layer over the pinned layer. The SOT layer is spaced apart from the memory stack. The free layer is over the memory stack and the SOT layer.
    Type: Grant
    Filed: June 17, 2019
    Date of Patent: November 16, 2021
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Ya-Jui Tsou, Zong-You Luo, Chee-Wee Liu, Shao-Yu Lin, Liang-Chor Chung, Chih-Lin Wang
  • Publication number: 20210193565
    Abstract: The present disclosure describes an interconnect structure and a method forming the same. The interconnect structure can include a substrate, a layer of conductive material over the substrate, a metallic capping layer over the layer of conductive material, a layer of insulating material over top and side surfaces of the metallic capping layer, and a layer of trench conductor formed in the layer of insulating material and the metallic capping layer.
    Type: Application
    Filed: July 27, 2020
    Publication date: June 24, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jason Huang, Liang-Chor Chung, Cheng-Yuan Li
  • Publication number: 20210082482
    Abstract: A magnetoresistive memory device includes a plurality of bottom conductive lines, a plurality of top conductive lines, a first memory cell, and a second memory cell. The top conductive lines are over the bottom conductive lines. The first memory cell is between the bottom conductive lines and the top conductive lines and includes a first magnetic tunnel junction (MTJ) stack. The second memory cell is adjacent the first memory cell and between the bottom conductive lines and the top conductive lines. The second memory cell includes a second MTJ stack, and a top surface of the second MTJ stack is higher than a top surface of the first MTJ stack.
    Type: Application
    Filed: September 16, 2019
    Publication date: March 18, 2021
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Zong-You LUO, Ya-Jui TSOU, Chee-Wee LIU, Shao-Yu LIN, Liang-Chor CHUNG, Chih-Lin WANG
  • Publication number: 20200395530
    Abstract: A magnetoresistive memory device includes a memory stack, a spin-orbit-torque (SOT) layer, and a free layer. The memory stack includes a pinned layer and a reference layer over the pinned layer. The SOT layer is spaced apart from the memory stack. The free layer is over the memory stack and the SOT layer.
    Type: Application
    Filed: June 17, 2019
    Publication date: December 17, 2020
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Ya-Jui TSOU, Zong-You LUO, Chee-Wee LIU, Shao-Yu LIN, Liang-Chor CHUNG, Chih-Lin WANG
  • Patent number: 8529864
    Abstract: A process for hydrogen production at lower temperature by using Mn/ZnO, Cu/MnO, Cu/CeO2, CuCe/ZnO and/or CuMn/ZnO catalysts, wherein a partial oxidization of methanol (POM) process can be initiated at an ambient reactor temperature lower than 100° C. and then undertaken at a reaction temperature lower than 200° C., and wherein POM process not only generates hydrogen rich gas (HRG) containing 4% CO or less but also generates 1.8 moles hydrogen or more per 1 mole methanol consumed.
    Type: Grant
    Filed: August 26, 2011
    Date of Patent: September 10, 2013
    Assignee: National Tsing Hua University
    Inventors: Yuh-Jeen Huang, Chuin-Tih Yeh, Tsui-Wei Wang, Liang-Chor Chung
  • Publication number: 20110311440
    Abstract: A process for hydrogen production at lower temperature by using Mn/ZnO, Cu/MnO, Cu/CeO2, CuCe/ZnO and/or CuMn/ZnO catalysts, wherein a partial oxidization of methanol (POM) process can be initiated at an ambient reactor temperature lower than 100° C. and then undertaken at a reaction temperature lower than 200° C., and wherein POM process not only generates hydrogen rich gas (HRG) containing 4% CO or less but also generates 1.8 moles hydrogen or more per 1 mole methanol consumed.
    Type: Application
    Filed: August 26, 2011
    Publication date: December 22, 2011
    Inventors: Yuh-Jeen HUANG, Chuin-Tih YEH, Tsui-Wei WANG, Liang-Chor CHUNG
  • Publication number: 20110212019
    Abstract: A self-started OSRM (oxidative steam reforming of methanol) process at evaporation temperature of aqueous methanol for hydrogen production is disclosed. In the process, an aqueous methanol steam and oxygen are pre-mixed. The mixture is then fed to a Cu/ZnO-based catalyst to initiate an OSRM process at evaporation temperature of aqueous methanol. The temperature of the catalyst bed, with suitable thermal isolation, may be raised automatically by the exothermic OSRM to enhance the conversion of methanol.
    Type: Application
    Filed: May 13, 2011
    Publication date: September 1, 2011
    Inventors: Yuh-Jeen HUANG, Chuin-Tih Yeh, Chien-Te Ho, Liang-Chor Chung
  • Publication number: 20100179056
    Abstract: A self-started OSRM (oxidative steam reforming of methanol) process at room temperature for hydrogen production. In the process, an aqueous methanol and oxygen are pre-mixed. The mixture is then fed to a Cu/ZnO-based catalyst to initiate an OSRM process at room temperature. The temperature of the catalyst bed, with suitable thermal isolation, may be raised automatically by the exothermic OSRM to enhance the conversion of methanol. A hydrogen yield of 2.4 moles per mole methanol from the process may be obtained.
    Type: Application
    Filed: March 24, 2010
    Publication date: July 15, 2010
    Inventors: Yuh-Jeen HUANG, Chuin-Tih YEH, Chien-Te HO, Liang-Chor CHUNG