Patents by Inventor Liang Ju WEI

Liang Ju WEI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240047225
    Abstract: A control method of a multi-stage etching process and a processing device using the same are provided. The control method of the multi-stage etching process includes the following step S. A stack information of a plurality of hard mask layers is set. An etching target condition is set. Through a machine learning model, a parameter setting recipe of the hard mask layers is generated under the etching target condition. The machine learning model is trained based on the stack information of the hard mask layers, a plurality of process parameters and a process result.
    Type: Application
    Filed: September 6, 2022
    Publication date: February 8, 2024
    Inventors: Liang Ju WEI, Chung-Yi CHIU, Zhen WU, Hsuan-Hsu CHEN, Chun-Lung CHEN