Abstract: A self-retaining O-ring having at least two radial struts connectively extending from inside surfaces to a central sphere-shaped retainer. The top surfaces of the radial struts are formed below the top surfaces of the O-ring. The central sphere-shaped retainer is connectively formed to the radial struts and extending below the bottom surfaces of the struts. A circular recess is provided for containing and supporting the O-ring, its inside surface is dovetailed. The circular recess has a spherical hole disposed on its center for insertion of the sphere-shaped retainer.

Abstract: A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive motor assembly to the ball-type lead screw. The vibration-dampening case can include a cross member into which the ball-type lead screw is disposed, one or more pillar members supporting the cross member, and one or more support stands. Each support stand supports a corresponding one of the one or more pillar members.

Abstract: A self-retaining O-ring having at least two radial struts connectively extending from inside surfaces to a central sphere-shaped retainer. The top surfaces of the radial struts are formed below the top surfaces of the O-ring. The central sphere-shaped retainer is connectively formed to the radial struts and extending below the bottom surfaces of the struts. A circular recess is provided for containing and supporting the O-ring, its inside surface is dovetailed. The circular recess has a spherical hole disposed on its center for insertion of the sphere-shaped retainer.

Abstract: A load port transfer mechanism having reduced particle contamination is described. The load port transfer mechanism comprises a load port transfer arm over which extends a cover and a means for blowing air past the load port transfer arm. The cover shields the load port transfer arm from particle contamination.

Abstract: An insert liner for a passage has a hollow liner shielding the passage from accumulation of particles during a manufacturing operation, the insert liner resiliently expands inside the passage to secure the insert liner in the passage without fasteners, and the liner has a nonporous surface that accumulates the particles.

Abstract: A dual-port endpoint detection window for a process chamber for substrates. The dual-port endpoint detection window of the present invention comprises a primary port and a secondary port each of which may be individually removably fitted with a light sensor for the endpoint detection system. A cover is provided for removably covering the secondary port. After the window of the primary port has become covered with material deposition as a result of prolonged use of the process chamber, the secondary port is uncovered for use and the light sensor is attached to the secondary port for continued use of the endpoint detection system through the secondary port.

Abstract: A new and improved, anodized aluminum gas distribution plate for process chambers, particularly an etch chamber. The gas distribution plate includes an aluminum body having multiple gas flow openings extending therethrough and an alumina anodized coating or layer on the plate. The gas distribution plate is characterized by enhanced longevity and durability and resists particle-forming deterioration and damage throughout prolonged use.

Abstract: A new and improved, anodized aluminum gas distribution plate for process chambers, particularly an etch chamber. The gas distribution plate includes an aluminum body having multiple gas low openings extending therethrough and an alumina anodized coating or layer on the plate. The gas distribution plate is charcterized by enhanced longevity and durability and resists particle-forming deterioration and damage throughout prolonged use.

Abstract: A chamber liner which includes a wall liner for protecting the interior wall surfaces of a process chamber from deposition of polymer contaminants thereon during a semiconductor fabrication process carried out in the chamber and a slot liner for protecting a wafer slot in the chamber from deposition of the polymer contaminants. The wall liner typically comprises a cylindrical liner wall that may be interrupted by an elongated slit to facilitate compressing the liner and placing the liner in the process chamber. Once positioned in the process chamber, the wall liner expands against the interior wall surfaces of the chamber. The slot liner is inserted through the wafer slot in the process chamber and communicates with a slot liner opening in the wall liner. Wafers are transferred into and out of the chamber through the slot liner.

Abstract: A dual-port endpoint detection window for a process chamber for substrates. The dual-port endpoint detection window of the present invention comprises a primary port and a secondary port each of which may be individually removably fitted with a light sensor for the endpoint detection system. A cover is provided for removably covering the secondary port. After the window of the primary port has become covered with material deposition as a result of prolonged use of the process chamber, the secondary port is uncovered for use and the light sensor is attached to the secondary port for continued use of the endpoint detection system through the secondary port.

Abstract: A vibration-dampening base for a ball-type lead screw of a load port transfer system is disclosed. A load port transfer system includes a vertical arm drive motor assembly, a ball-type lead screw, and a vibration-dampening base connecting the vertical arm drive motor assembly to the ball-type lead screw. The vibration-dampening case can include a cross member into which the ball-type lead screw is disposed, one or more pillar members supporting the cross member, and one or more support stands. Each support stand supports a corresponding one of the one or more pillar members.

Abstract: A polarization insensitive optical device is disclosed which is capable of providing direct optical amplification of an input signal of unknown (and possibly varying) polarization. A polarization diversity technique is utilized wherein a polarization beam splitter is used to divide the incoming signal into orthogonal components of known polarization (TE,TM). The orthogonal components are then separately amplified, using a semiconductor laser as the amplifying device. The amplified components are then recombined, either optically or electrically, to form the final output signal.

Abstract: A coherent lightwave demodulator is disclosed which is insensitive to the polarization state of the incoming message signal. The demodulator includes a pair of optical hybrids (aligned to the polarization state of the local oscillator) and a pair of optical balanced receivers. A squaring arrangement, for example a delay demodulator, responsive to the output from the pair of optical balanced receivers eliminates the polarization-dependent component of the message signal and allows the recovery of the message signal regardless of the polarization state of the incoming message signal.