Abstract: A gravimeter probe includes a spring structure, a proof mass, movable comb fingers, fixed comb fingers, and an outer frame. A fixed end of the spring structure is arranged on the outer frame and a free end thereof is connected to the proof mass. The movable comb fingers are arranged on upper and lower surfaces of the proof mass, and the fixed comb fingers are correspondingly arranged on the outer frame. Each of the movable comb fingers and the fixed comb fingers has a special-shaped comb finger structure. The special-shaped comb finger structure includes a comb finger bottom portion and a comb finger top portion, and the width of the comb finger bottom portion is smaller than the width of the comb finger top portion.

Abstract: A gravimeter probe includes a spring structure, a proof mass, movable comb fingers, fixed comb fingers, and an outer frame. A fixed end of the spring structure is arranged on the outer frame and a free end thereof is connected to the proof mass. The movable comb fingers are arranged on upper and lower surfaces of the proof mass, and the fixed comb fingers are correspondingly arranged on the outer frame. Each of the movable comb fingers and the fixed comb fingers has a special-shaped comb finger structure. The special-shaped comb finger structure includes a comb finger bottom portion and a comb finger top portion, and the width of the comb finger bottom portion is smaller than the width of the comb finger top portion.

Abstract: The present invention discloses a MEMS gravimeter comprising: a spring-mass system, a displacement sensing structure, a displacement detecting circuit, a cavity body and a level adjustment base; the spring-mass system is disposed inside the cavity body and includes: a negative-stiffness spring, a positive-stiffness spring, a proof mass and an outer frame; the proof mass is connected to the outer frame by the negative-stiffness spring and the positive-stiffness spring, the negative-stiffness spring and the positive-stiffness spring are symmetrically disposed with respect to the proof mass, and the outer frame is fixedly connected to the cavity body; the displacement sensing structure is located on a surface of the proof mass, and the displacement detecting circuit is configured to detect a displacement signal from the displacement sensing structure; the spring-mass system realizes reduction in resonant frequency by matching of the positive and negative stiffness springs; and change in gravitational acceleratio

Abstract: The present invention discloses a MEMS gravimeter comprising: a spring-mass system, a displacement sensing structure, a displacement detecting circuit, a cavity body and a level adjustment base; the spring-mass system is disposed inside the cavity body and includes: a negative-stiffness spring, a positive-stiffness spring, a proof mass and an outer frame; the proof mass is connected to the outer frame by the negative-stiffness spring and the positive-stiffness spring, the negative-stiffness spring and the positive-stiffness spring are symmetrically disposed with respect to the proof mass, and the outer frame is fixedly connected to the cavity body; the displacement sensing structure is located on a surface of the proof mass, and the displacement detecting circuit is configured to detect a displacement signal from the displacement sensing structure; the spring-mass system realizes reduction in resonant frequency by matching of the positive and negative stiffness springs; and change in gravitational acceleratio