Patents by Inventor Libor Vyklick

Libor Vyklick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ORGANIC GRADED SPIN ON BARC COMPOSITIONS FOR HIGH NA LITHOGRAPHY
    Publication number: 20120205787
    Abstract: An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer.
    Type: Application
    Filed: March 19, 2012
    Publication date: August 16, 2012
    Applicant: International Business Machines Corporation
    Inventors: Dario L. Goldfarb, Libor Vyklick, Sean D. Burns, David R. Medeiros, Daniel P. Sanders, Robert D. Allen