Patents by Inventor Lin Chan-Ching

Lin Chan-Ching has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for measuring the complex refractive index and thin film thickness of a sample
    Patent number: 6483584
    Abstract: An ellipsometer for measuring the complex refractive index of a sample and thin film thickness according to the invention. The ellipsometer includes a linear polarized light source, a reference analyzer, a polarization analyzer and a light direction controller. The linear polarized light source used to generate a measuring beam for detecting the sample. The phase modulator used to control the phase of the measuring beam thereby to generate a sampling beam. The reference analyzer used to generate a reference beam according to part of the sampling beam thereby to adjust the intensity of the sampling beam. The polarization analyzer used to analyze the phase, polarization and intensity of the sampling beam after the sampling beam is reflected by the sample.
    Type: Grant
    Filed: April 14, 2000
    Date of Patent: November 19, 2002
    Assignee: National Science Council
    Inventors: Solomon J. H. Lee, Chih-Kung Lee, Shu-Sheng Lee, Yang Yun-Chang, Lin Chan-Ching, Shuen-Chen Shiue