Patents by Inventor Lin Jia Suen

Lin Jia Suen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dynamic adjustment and auto generation of water per hour (WPH) in capacity check system (CCS) by tool performance tracking platform (TP2)
    Patent number: 6662066
    Abstract: A manufacturing execution system determines production rates of tool elements of a manufacturing system and from the production rates, the efficiency of the tool elements and the efficiency of the manufacturing process system. The manufacturing execution system is in communication with a plurality of tool elements of the manufacturing process system. The manufacturing execution system includes a process data collection device, a data retaining device such as a memory, a time recording device, and a production rate calculator. The process data collection device is in communication with sensors located on the tool elements to receive tool element status data. The data retaining device is in communication with the process data collection device to record and retain the tool element status data. The time recording device records times of changes of the tool element status data to the data retaining device.
    Type: Grant
    Filed: April 23, 2002
    Date of Patent: December 9, 2003
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Lin Chien Yu, Ni Chung Cheng, Lin Jia Suen