Patents by Inventor Lin-Sheng Jin

Lin-Sheng Jin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140130982
    Abstract: A thin film processing apparatus assembles a substrate and an auxiliary plate tightly and the substrate is coated with a thin film whereon the auxiliary plate is situated. Since the substrate or the auxiliary plate is transparent for thermal radiation, the thin film heated by thermal radiation symmetrically in thickness direction will be available. Consequentially debonding, warping and cracking of thin film are thus prevented and outgassing from thin film is eliminated as well.
    Type: Application
    Filed: November 13, 2012
    Publication date: May 15, 2014
    Inventors: Chiung-Chieh Su, Sung-Cheng Hu, Chin-Horng Yau, Lin-Sheng Jin, Ming-June Lin, Meng-Chiuan Yu