Patents by Inventor Linda B. Braly

Linda B. Braly has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for controlling and reducing profile variation in photoresist trimming
    Patent number: 7018780
    Abstract: A method for controlling a removal of photoresist material from a semiconductor substrate is provided. The method includes providing the semiconductor substrate having a photoresist mask formed thereon. The method also includes forming a conformal layer of polymer over the photoresist mask and a portion of the semiconductor substrate not covered by the photoresist mask while concurrently removing a portion of the conformal layer of polymer. The thickness of the conformal layer of polymer on each region of the semiconductor substrate is set to vary depending on a removal rate of the conformal layer of polymer in each region of the semiconductor substrate.
    Type: Grant
    Filed: February 28, 2003
    Date of Patent: March 28, 2006
    Assignee: Lam Research Corporation
    Inventors: Vahid Vahedi, Linda B. Braly
  • Methods for controlling and reducing profile variation in photoresist trimming
    Publication number: 20030148224
    Abstract: A method for controlling a removal of photoresist material from a semiconductor substrate is provided. The method includes providing the semiconductor substrate having a photoresist mask formed thereon. The method also includes forming a conformal layer of polymer over the photoresist mask and a portion of the semiconductor substrate not covered by the photoresist mask while concurrently removing a portion of the conformal layer of polymer. The thickness of the conformal layer of polymer on each region of the semiconductor substrate is set to vary depending on a removal rate of the conformal layer of polymer in each region of the semiconductor substrate.
    Type: Application
    Filed: February 28, 2003
    Publication date: August 7, 2003
    Applicant: Lam Research Corporation
    Inventors: Vahid Vahedi, Linda B. Braly