Abstract: The invention relates to a method of inspecting parts of a sample on a TEM grid with a fluorescence microscope, as arises when performing correlative microscopy, more specifically for samples on a holey carbon grid. A problem occurs when imaging vitrified ice with sample material when the ice is heated by the light used. The invention is based on the insight that the absorption in the carbon support film is responsible for the heating, as ice hardly absorbs light. By localizing the illumination of the fluorescent microscope to the parts of the sample that are above a hole in the carbon, heating of the ice is lowered. The localization can be achieved by, for example, passing the light through a LCD type Spatial Light Modulator.