Patents by Inventor Linda Gundal

Linda Gundal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining correction values for the measured values of positions of structures on a substrate
    Patent number: 7584072
    Abstract: A method for allocating correction values of the degree of bending of a substrate (2) relative to a coordinate system (40) of a coordinate measuring machine (1) is disclosed. The positions of the at least two reference marks (32) on the substrate holder (27) are automatically determined relative to the coordinate system (40) of the coordinate measuring machine (1) for each substrate (2) currently placed in the substrate holder (27) in the coordinate measuring machine (1).
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: September 1, 2009
    Assignee: Vistec Semiconductor Systems GmbH
    Inventors: Wolfgang Fricke, Linda Gundal
  • Method for Determining Correction Values for the Measured Values of Positions of Structures on a Substrate
    Publication number: 20090024351
    Abstract: A method for allocating correction values of the degree of bending of a substrate (2) relative to a coordinate system (40) of a coordinate measuring machine (1) is disclosed. The positions of the at least two reference marks (32) on the substrate holder (27) are automatically determined relative to the coordinate system (40) of the coordinate measuring machine (1) for each substrate (2) currently placed in the substrate holder (27) in the coordinate measuring machine (1).
    Type: Application
    Filed: June 27, 2008
    Publication date: January 22, 2009
    Applicant: VISTEC SEMICONDUCTOR SYSTEMS GMBH
    Inventors: Wolfgang Fricke, Linda Gundal