Patents by Inventor Linda Lee Stenzel

Linda Lee Stenzel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pasting method for eliminating flaking during nitride sputtering
    Patent number: 6589398
    Abstract: The present invention pertains to methods for preventing metal or metal-derived material from flaking during sputter processing of substrates. Methods of the invention are particularly useful for non-planar sputter targets. The magnetic field configuration in a sputter apparatus is modulated during a pasting process. Flaking from regions of the target, shield, or other internal components of the sputter apparatus is inhibited by pasting methods which include encapsulation and optionally removal of material, for example by erosion via high density plasma.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: July 8, 2003
    Assignee: Novellus Systems, Inc.
    Inventors: Jean Qing Lu, Jeffrey Andrew Tobin, Linda Lee Stenzel, Lananh Pham