Abstract: A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a standardized 3D profile model; determining an ideal curved surface as a conventional true value of the standardized 3D profile model; scanning the standardized 3D profile model by the laser measurement machine and obtaining point cloud data; calculating a bias between each point in the point cloud and the ideal curved surface; evaluating the veracity of the laser measurement machine by using the largest bias; and evaluating the receptiveness of the laser measurement machine.

Abstract: A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a standardized BGA model; measuring Z coordinates values of each solder ball peak of the BGA model for certain times; determining a Z coordinates conventional true value of each solder ball peak; measuring X, Y coordinates values of each solder ball centre of the BGA model; determining a coplanarity conventional true value of a seating-plane; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the BGA model under the optimum scanning parameters and the optimum scanning mode; obtaining X, Y, Z coordinates values of each solder ball peak; evaluating the veracity of Z coordinates of each solder ball peak; evaluating the veracity and repetitiveness of coplanarity; and evaluating scan precision of the laser measurement machine.

Abstract: A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a transparent flat, of which the flatness of each plane is regarded as a flatness conventional true value; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the transparent flat under the optimum scanning mode and the optimum scanning parameters for certain times, and obtaining measuring data; calculating a plurality of flatness values using the measuring data; calculating an average value and a standard deviation of the flatness values, and a bias between the average value and the flatness conventional true value; evaluating the repetitiveness of the laser measurement machine according to the standard deviation; and evaluating the veracity of the laser measurement machine according to the bias.

Abstract: A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a transparent flat, of which the flatness of each plane is regarded as a flatness conventional true value; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the transparent flat under the optimum scanning mode and the optimum scanning parameters for certain times, and obtaining measuring data; calculating a plurality of flatness values using the measuring data; calculating an average value and a standard deviation of the flatness values, and a bias between the average value and the flatness conventional true value; evaluating the repetitiveness of the laser measurement machine according to the standard deviation; and evaluating the veracity of the laser measurement machine according to the bias.

Abstract: A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a standardized 3D profile model; determining an ideal curved surface as a conventional true value of the standardized 3D profile model; scanning the standardized 3D profile model by the laser measurement machine and obtaining point cloud data; calculating a bias between each point in the point cloud and the ideal curved surface; evaluating the veracity of the laser measurement machine by using the largest bias; and evaluating the receptiveness of the laser measurement machine.

Abstract: A method for verifying scan precision of a laser measurement machine includes the steps of: preparing a standardized BGA model; measuring Z coordinates values of each solder ball peak of the BGA model for certain times; determining a Z coordinates conventional true value of each solder ball peak; measuring X, Y coordinates values of each solder ball centre of the BGA model; determining a coplanarity conventional true value of a seating-plane; determining an optimum scanning mode; determining optimum scanning parameters under the optimum scanning mode; scanning the BGA model under the optimum scanning parameters and the optimum scanning mode; obtaining X, Y, Z coordinates values of each solder ball peak; evaluating the veracity of Z coordinates of each solder ball peak; evaluating the veracity and repetitiveness of coplanarity; and evaluating scan precision of the laser measurement machine.