Patents by Inventor Ling Zhi Tan

Ling Zhi Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated circuit system with clean surfaces
    Patent number: 7968148
    Abstract: An integrated circuit system includes providing an integrated circuit wafer; applying a first cleaning solution over the integrated circuit wafer; and applying a second cleaning solution over the integrated circuit wafer to prevent or remove a defect resulting from the first cleaning process.
    Type: Grant
    Filed: September 13, 2007
    Date of Patent: June 28, 2011
    Assignee: Globalfoundries Singapore Pte. Ltd.
    Inventors: Yin-Min Felicia Goh, Zainab Ismail, Yong Siang Tan, Ling Zhi Tan, Sin Ping Chiew
  • INTEGRATED CIRCUIT SYSTEM WITH CLEAN SURFACES
    Publication number: 20080069958
    Abstract: An integrated circuit system includes providing an integrated circuit wafer; applying a first cleaning solution over the integrated circuit wafer; and applying a second cleaning solution over the integrated circuit wafer to prevent or remove a defect resulting from the first cleaning process.
    Type: Application
    Filed: September 13, 2007
    Publication date: March 20, 2008
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
    Inventors: Yin-Min Felicia Goh, Zainab Ismail, Yong Siang Tan, Ling Zhi Tan, Sin Ping Chiew