Abstract: A transfer module used in a semiconductor manufacturing apparatus, in which a moving body equipped with a magnet moves in a state of being levitated from a floor by magnetic force to transfer a substrate to a processing module for processing the substrate is provided. The transfer module comprises the moving body, a housing forming a moving space therein where the moving body moves, a power consuming device provided in the moving body, a first coil provided above the moving space, and a second coil provided in the moving body to generate an induced current through a magnetic field formed by the first coil, which is powered, in order to supply power to the power consuming device.

Abstract: Provided is a substrate transfer device comprising: a tile part forming a moving surface of an area where a substrate is transferred and provided with a plurality of first coils that generate magnetic field on the moving surface by a power supplied from a power supply part; and a substrate transfer module including a plurality of magnets that exert a repulsive force against the magnetic field and a substrate holder configured to hold a substrate to be transferred, the substrate transfer module configured to move above the moving surface by magnetic levitation using the repulsive force, wherein the substrate transfer module includes a second coil for wirelessly supplying a power to a power consuming device provided in the substrate transfer module during movement above the moving surface using an electromotive force that is exerted against the magnetic field generated by the first coils.

Abstract: An apparatus for transferring a substrate to a substrate processing chamber. The apparatus comprises: a substrate transfer chamber having a floor and a side wall; a substrate transfer module comprising a holder and second magnets, and configured to be movable in the substrate transfer chamber by magnetic levitation; and a controller configured to control an operating force for moving the substrate transfer module. The controller comprises: a parameter storage configured to store at least one model parameter; a control schedule creating section configured to acquire identification information and a movement schedule, to obtain the operating force, and to output a control schedule; and a magnetic force adjusting section configured to perform feedforward control.