Patents by Inventor Linli XIE

Linli XIE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR INTEGRATING DIODE SENSORS ON MICROMACHINED WAFER PROBES
    Publication number: 20210223288
    Abstract: A probe chip device and a method for fabricating a probe chip device with an integrated diode sensor are disclosed. In one example, a probe chip device includes a beam head element that includes at least one probe tip that is configured to electrically probe a device under test. The probe chip device further includes a diode sensor that is heterogeneously integrated on the beam head element and is proximally positioned to the at least one probe tip.
    Type: Application
    Filed: May 10, 2019
    Publication date: July 22, 2021
    Applicant: University of Virginia Patent Foundation
    Inventors: Robert M. WEIKLE, Linli XIE, Michael E. CYBEREY, Souheil NADRI, Matthew F. BAUWENS, Arthur Weston LICHTENBERGER, Nicolas Scott BARKER