Abstract: The present invention discloses a tunnel-type microwave vacuum ultra-low temperature drying equipment and a material drying process for drying a material. The tunnel-type microwave vacuum ultra-low temperature drying equipment comprises: a host device, comprising a chamber and a plurality of microwave generators, wherein the plurality of microwave generators are respectively provided on an outer wall surface of the chamber and sequentially arranged at least along a lengthwise direction of the chamber; a vacuum unit, having a vacuum port connected to the chamber through a pipeline; a chiller unit, having a cooling water pipe connected to the microwave generator, wherein the chiller unit is used to cool the microwave generator. This disclosure enables rapid low-temperature evaporation of water-containing materials in a vacuum environment to achieve drying with high efficiency. In addition, it can also prevent damage to materials caused by excessive temperatures.