Patents by Inventor Lionel Marmie

Lionel Marmie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for implanting semiconductor wafer substrates
    Patent number: 7053386
    Abstract: A gripper for loading wafers onto an implant wheel W and removing them from the wheel. The gripper having a substrate engaging mechanism (14) for engaging the substrate and a means for rotating this substrate engaging mechanism, such that wafers can be removed from the implant wheel, rotated to a second orientation and replaced without leaving the process chamber.
    Type: Grant
    Filed: February 5, 2001
    Date of Patent: May 30, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Tristan Richard Holtam, Richard Cooke, Peter Edwards, Geoffrey D. Paffett, Lionel Marmie