Abstract: An oscillating mirror for lidar has a mirror coupled with a rotor. The rotor is arranged to rotate about a pivot using one or more bearings. A mirror is coupled with the rotor and arranged to reflect light emitted from a laser. A first magnet is coupled with the rotor. A second magnet is coupled with a base. The second magnet is arranged to limit an angular rotation of the rotor by a pole of the second magnet facing a similar pole of the first magnet.

Abstract: Provided are modified influenza virus subtype 2 neuraminidase molecules lacking all or substantially all of the stalk region that form active, soluble tetrameric neuraminidase when expressed in host cells and vaccine compositions comprising the tetrameric neuraminidase or a nucleic acid encoding the modified monomeric influenza virus subtype 2 neuraminidase molecules that forms tetrameric NA when expressed in a cell. Also provided are methods of using the vaccine compositions to vaccinate or immunize a subject against influenza virus.

Abstract: An electro-optical component, such as a laser or detector, on a module is aligned with a base, or lens system, for an optical sensor, such as a lidar sensor. Translating stages, or a robotic arm, can be used to rotate and translate the module into position. Two or more cameras can be used for ascertaining precise alignment of the electro-optical component.

Abstract: A scanning lidar has an illumination source comprising a plurality of lasers and a mirror system. The mirror system reflects light from the illumination source into an environment within a field of view. The mirror system includes a mirror arranged to rotate to reflect light from the illumination source to scan light from the plurality of lasers horizontally within the field of view of the system. The mirror system reflects light from the illumination source to position light, in discrete vertical steps, from the plurality of lasers vertically within the field of view.

Abstract: A headlamp module of a vehicle includes a housing including a window, an illumination submodule disposed inside the housing and configured to provide illumination light to be transmitted through the window toward a scene in front of the vehicle, and a first LiDAR sensor disposed inside the housing and laterally displaced from the illumination submodule. The first LiDAR sensor includes one or more laser sources configured to emit laser beams to be transmitted through the window toward the scene, the laser beams being reflected off of one or more objects in the scene, thereby generating return laser beams to be transmitted through the window toward the first LiDAR sensor and one or more detectors configured to receive and detect the return laser beams.

Abstract: A scanning lidar system includes an external frame, an internal frame attached to the external frame by vibration-isolation mounts, and an electro-optic assembly movably attached to the internal frame and configured to be translated with respect to the internal frame during scanning operation of the scanning lidar system.

Abstract: A three-dimensional imaging system includes a first illumination source configured to project a first fan of light toward an object in a field of view, and a second illumination source configured to project a second fan of light substantially parallel to and spaced apart from the first fan of light. The first illumination source and the second illumination source are further configured to scan the first fan of light and the second fan of light synchronously laterally across the field of view. The three-dimensional imaging system further includes a camera configured to capture a plurality of image frames of the field of view as the first fan of light and the second fan of light are scanned over a plurality of regions the object, and a processor coupled to the camera and configured to construct a three-dimensional image of the object based on the plurality of image frames.

Abstract: A scanning lidar system includes a fixed frame, a first platform flexibly attached to the fixed frame, a lens assembly including a first lens and a second lens mounted on the first platform, a second platform flexible attached to the fixed frame, an electro-optic assembly including a first laser source and a first photodetector mounted on the second platform, a drive mechanism mechanically coupled to the first platform and the second platform and configured to translate the first platform and the second platform with respect to the fixed frame, and a controller coupled to the drive mechanism and configured to translate the first platform to a plurality of first positions through the drive mechanism and translate the second platform to a plurality of second positions through the drive mechanism such that a motion of the second platform is substantially opposite to a motion of the first platform.

Abstract: A headlamp module of a vehicle includes a housing including a window, an illumination submodule disposed inside the housing and configured to provide illumination light to be transmitted through the window toward a scene in front of the vehicle, and a first LiDAR sensor disposed inside the housing and laterally displaced from the illumination submodule. The first LiDAR sensor includes one or more laser sources configured to emit laser beams to be transmitted through the window toward the scene, the laser beams being reflected off of one or more objects in the scene, thereby generating return laser beams to be transmitted through the window toward the first LiDAR sensor and one or more detectors configured to receive and detect the return laser beams.

Abstract: A scanning lidar system includes a fixed frame, a first platform flexibly attached to the fixed frame, a lens assembly including a first lens and a second lens mounted on the first platform, a second platform flexible attached to the fixed frame, an electro-optic assembly including a first laser source and a first photodetector mounted on the second platform, a drive mechanism mechanically coupled to the first platform and the second platform and configured to translate the first platform and the second platform with respect to the fixed frame, and a controller coupled to the drive mechanism and configured to translate the first platform to a plurality of first positions through the drive mechanism and translate the second platform to a plurality of second positions through the drive mechanism such that a motion of the second platform is substantially opposite to a motion of the first platform.

Abstract: A scanning lidar system includes an external frame, an internal frame attached to the external frame by vibration-isolation mounts, and an electro-optic assembly movably attached to the internal frame and configured to be translated with respect to the internal frame during scanning operation of the scanning lidar system.

Abstract: A three-dimensional imaging system includes a first illumination source configured to project a first fan of light toward an object in a field of view, and a second illumination source configured to project a second fan of light substantially parallel to and spaced apart from the first fan of light. The first illumination source and the second illumination source are further configured to scan the first fan of light and the second fan of light synchronously laterally across the field of view. The three-dimensional imaging system further includes a camera configured to capture a plurality of image frames of the field of view as the first fan of light and the second fan of light are scanned over a plurality of regions the object, and a processor coupled to the camera and configured to construct a three-dimensional image of the object based on the plurality of image frames.

Abstract: One embodiment relates to a dual Wien-filter monochromator. A first Wien filter focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane. A slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range. A second Wien filter focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to a dual Wien-filter monochromator. A first Wien filter focuses an electron beam in a first plane while leaving the electron beam to be parallel in a second plane. A slit opening allows electrons of the electron beam having an energy within an energy range to pass through while blocking electrons of the electron beam having an energy outside the energy range. A second Wien filter focuses the electron beam to become parallel in the first plane while leaving the electron beam to be parallel in the second plane. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to an apparatus for high-resolution electron beam imaging. The apparatus includes an energy filter configured to limit an energy spread of the electrons in the incident electron beam. The energy filter may be formed using a stigmatic Wien filter and a filter aperture. Another embodiment relates to a method of forming an incident electron beam for a high-resolution electron beam apparatus. Another embodiment relates to a stigmatic Wien filter that includes curved conductive electrodes. Another embodiment relates to a stigmatic Wien filter that includes a pair of magnetic yokes and a multipole deflector. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to a tilt-imaging scanning electron microscope apparatus. The apparatus includes an electron gun, first and second deflectors, an objective electron lens, and a secondary electron detector. The first deflector deflects the electron beam away from the optical axis, and the second deflector deflects the electron beam back towards the optical axis. The objective lens focuses the electron beam onto a spot on a surface of a target substrate, wherein the electron beam lands on the surface at a tilt angle. Another embodiment relates to a method of imaging a surface of a target substrate using an electron beam with a trajectory tilted relative to a substrate surface. Other embodiments and features are also disclosed.

Abstract: One embodiment relates to an electron beam apparatus which includes a dual-lens electron gun for emitting an electron beam. The electron beam is a high beam-current electron beam in a first operating mode and a low beam-current electron beam in a second operating mode. The apparatus further includes a column aperture which is out of the path of the high beam-current electron beam in the first operating mode and is centered about an optical axis of the electron beam apparatus in the second operating mode. Another embodiment relates to an electron gun which includes a first gun lens, a beam limiting aperture, and a second gun lens. The first gun lens focuses the electrons before they pass through the beam-limiting aperture while the second gun lens focuses the electrons after they pass through the beam-limiting aperture. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to an electron beam apparatus which includes a dual-lens electron gun for emitting an electron beam. The electron beam is a high beam-current electron beam in a first operating mode and a low beam-current electron beam in a second operating mode. The apparatus further includes a column aperture which is out of the path of the high beam-current electron beam in the first operating mode and is centered about an optical axis of the electron beam apparatus in the second operating mode. Another embodiment relates to an electron gun which includes a first gun lens, a beam limiting aperture, and a second gun lens. The first gun lens focuses the electrons before they pass through the beam-limiting aperture while the second gun lens focuses the electrons after they pass through the beam-limiting aperture. Other embodiments, aspects and features are also disclosed.

Abstract: The present disclosure provides an electron beam column with substantially improved resolution and/or throughput for inspecting manufactured substrates. The electron beam column comprises an electron gun, a scanner, an objective lens, and a detector. In accordance with one embodiment, the electron gun includes a gun lens having a flip-up pole piece configuration. In accordance with another embodiment, the scanner comprises a dual scanner having a pre-scanner and a main scanner, and the detector may be configured between the electron gun and the pre-scanner. In accordance with another embodiment, the electron beam column includes a continuously-variable aperture configured to select a beam current. Other embodiments relate to methods of using an electron beam column for automated inspection of manufactured substrates. In one embodiment, for example, an aperture size is adjusted to achieve a minimum spot size given a selected beam current and a column-condition domain being used.

Abstract: One embodiment disclosed relates to a method for fabricating a calibration sample. The method includes lithographically patterning a first side of a wafer with a pattern of a self-supporting membrane, etching the first side of the wafer to form the self-supporting membrane in a layer on the first side, and etching a second side of the wafer to reach the layer so as to suspend the membrane over an empty space. Another embodiment disclosed relates to a charged particle beam system. The system includes a charged particle source, a focusing column and lens assembly, a detector, and a suspended membrane calibration sample. Another embodiment disclosed relates a suspended membrane calibration sample for a charged particle beam system. The calibration sample includes a plurality of calibration patterns in an array, a suspended membrane that is self-supporting and includes the plurality of calibration patterns, and an empty space underneath the membrane.