Abstract: A waveguide image combiner is used to transmit a monochrome or full-color image in an augmented reality display. The combiner uses multiple stacked substrates and multiple pairs of incoupling and outcoupling VHOEs to expand a first FOV and an image expander to expand the second or perpendicular FOV. This suitably provides an expanded FOV that offers a diagonal FOV?50°, a horizontal FOV?40 and a vertical FOV?25°. The combiner also delivers a large horizontal eye box up to 20 mm and a vertical eye box of 10 mm while maintaining high light efficiency of the real scene (e.g. >80%). The system is able to use a light engine based on broadband (10 nm????40 nm) LEDs and maintain a large horizontal field of view and high transmission of the real imagery. The approach resolves issues with current embodiments including astigmatism, image overlap, color balance, and small light engine pupils leading to reduced eye boxes.

Abstract: Reflection mode VHOEs are designed and fabricated for use in imaging and other applications that require high diffraction efficiency with minimal chromatic aberrations and astigmatism across the bandwidth. A single VHOE acts as a mirror to reflect light (0th diffraction order) at the specified wavelength(s) and bandwidth with a principal ray at an angle equal to an angle of incidence of broadband light. A composite VHOE includes a complementary pair of input and output VHOEs each configured to diffract light into a non-zero Nth order. The input and output VHOEs are positioned in parallel to and offset from each other such that the filtered Nth order beam exits the composite lens on a path at the angle of incidence and parallel to the broadband light while suppressing the unwanted 0th order beam. The composite lens improves suppression of unwanted wavelengths while still achieving minimal chromatic aberration.

Abstract: Transmission and reflection mode VHOEs are designed and fabricated for use in imaging and other applications. These VHOE provide high diffraction efficiency with minimal chromatic aberrations and astigmatism across the bandwidth. The lens provides optical power within the bandwidth centered relative to several wavelengths to magnify (focus or collimate) input light and is transparent for the rest of the image spectrum. In transmission mode, two VHOE are fabricated in such a way as to introduce compensating adjustments that minimize the astigmatism and chromatic aberrations introduced by the bandwidth of the input light. Two VHOEs are required to provide an on-axis imaging system to magnify light to form an image and reduce the chromatic aberrations across the bandwidth and reduce the astigmatism while maintaining high diffraction efficiency (DE).

Abstract: A waveguide image combiner is used to transmit a monochrome or full-color image in an augmented reality display. The combiner uses multiple stacked substrates and multiple pairs of incoupling and outcoupling VHOEs to expand a first FOV and an image expander to expand the second or perpendicular FOV. This suitably provides an expanded FOV that offers a diagonal FOV?50°, a horizontal FOV?40 and a vertical FOV?25°. The combiner also delivers a large horizontal eye box up to 20 mm and a vertical eye box of 10 mm while maintaining high light efficiency of the real scene (e.g. >80%). The system is able to use a light engine based on broadband (10 nm????40 nm) LEDs and maintain a large horizontal field of view and high transmission of the real imagery. The approach resolves issues with current embodiments including astigmatism, image overlap, color balance, and small light engine pupils leading to reduced eye boxes.

Abstract: Transmission and reflection mode VHOEs are designed and fabricated for use in imaging and other applications. These VHOE provide high diffraction efficiency with minimal chromatic aberrations and astigmatism across the bandwidth. The lens provides optical power within the bandwidth centered relative to several wavelengths to magnify (focus or collimate) input light and is transparent for the rest of the image spectrum. In transmission mode, two VHOE are fabricated in such a way as to introduce compensating adjustments that minimize the astigmatism and chromatic aberrations introduced by the bandwidth of the input light. Two VHOEs are required to provide an on-axis imaging system to magnify light to form an image and reduce the chromatic aberrations across the bandwidth and reduce the astigmatism while maintaining high diffraction efficiency (DE).

Abstract: A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam.

Abstract: A method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical mechanical polishing (CMP) of a substrate using a polishing tool and a film thickness monitor. The tool has an opening placed in it. The opening contains a monitoring window secured in it to create a monitoring channel. A film thickness monitor views the substrate through the monitoring channel to provide an indication of the thickness of a film carried by the substrate. This information can be used to determine the end point of the CMP process, determine removal rate at any given circumference of a substrate, determine average removal rate across a substrate surface, determine removal rate variation across a substrate surface, and optimize removal rate and uniformity. The film thickness monitor comprises a spectrometer.

Abstract: A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam.

Abstract: A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape,to reduce off-axis aberrations in the focused beam.