Patents by Inventor Lo Yong Hong

Lo Yong Hong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Isolation process for surface micromachined sensors and actuators
    Patent number: 5930595
    Abstract: A novel process for fabricating an integrated circuit sensor/actuator is described. Silicon islands are created by forming deep trenches in a substrate and lining the trenches with oxide. This forms silicon islands substantially surrounded by electrically isolating oxide. The anchor portion of the sensor/actuator beams is connected to the islands and is released from the substrate and therefore is also electrically isolated from the substrate. The IC sensor/actuator is manufactured by forming deep trenches in a substrate.
    Type: Grant
    Filed: October 15, 1997
    Date of Patent: July 27, 1999
    Assignee: Institute of Microelectronics National University of Singapore
    Inventors: Uppili Sridhar, Liu Lian Jun, Foo Pang Dow, Lo Yong Hong, Maio Yu Bo