Patents by Inventor Loic Joet

Loic Joet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11156459
    Abstract: Microelectromechanical sensor comprising a fixed part and a mobile part suspended from the fixed part such that the mobile part can move at least in an out-of-plane displacement direction, the fixed part comprising at least first electrodes extending parallel to the displacement direction of the mobile part, the mobile part comprising a seismic mass and at least second electrodes extending parallel to the out-of-plane displacement direction, the first electrodes and the second electrodes being located relative to each other so as to be interdigitated, in which the second electrodes are directly connected to the inertial mass and only part of the face of each mobile electrode is facing an electrode fixed at rest.
    Type: Grant
    Filed: June 16, 2017
    Date of Patent: October 26, 2021
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Federico Maspero, Loic Joet
  • Publication number: 20210292158
    Abstract: A microelectromechanical microphone including a microphone unit made from a first substrate, the microphone unit including a movable element capable of being displaced under the effect of a pressure difference and a device for measuring the displacement of the movable element, a cover made from a second substrate, the cover having a first recess, first device for electrically connecting the measurement device to a control unit, the microphone unit and the cover delimiting between them a vacuum space housing the measurement device and a first cavity, from the first recess, partly closed by the movable element, the vacuum space and the first cavity being insulated in a sealed manner from each other, the microphone including a device for mechanically transmitting the displacement of the movable element to the measurement device and a sealed insulation element through which the transmission device passes.
    Type: Application
    Filed: March 19, 2021
    Publication date: September 23, 2021
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Samer DAGHER, Loic JOET
  • Patent number: 11085945
    Abstract: An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis includes a substrate featuring a plane; a mass having a central zone and suspended relative to the substrate; a single lever arm comprising: a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and a second end connected to the mass by means of a second connection adapted to transmit movement in translation of the mass to the lever arm whilst allowing rotation of the lever arm about the rotation axis; the second end of the lever arm being disposed at the level of the central zone of the mass; at least one strain gauge comprising: a first end connected to the substrate, and a second end connected to the lever arm.
    Type: Grant
    Filed: July 19, 2019
    Date of Patent: August 10, 2021
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Loïc Joet
  • Patent number: 11041992
    Abstract: A hinge between a first part and a second part of a microelectromechanical system including a first element and a second element free to move relative to each other in an out-of-plane direction is disclosed. The hinge includes a first rigid part; a second part fixed to a first face of the first part by one end and anchored to the second element by a second end, the second part deforming in bending in the out-of-plane direction; and a third part fired to a first face of the first part by a second end, and anchored to the first element by a second end, the third part deforming in bending in the out-of-plane direction. In an undeformed state, the second part and the third part each includes one face located in the same plane orthogonal to the out-of-plane direction.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: June 22, 2021
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Samer Dagher, Loic Joet
  • Publication number: 20210114865
    Abstract: Disclosed is a hinged MEMS and/or NEMS device with out-of-plane movement including a first portion and a second portion that is hinged so as to be able to rotate with respect to the first portion about an axis of rotation contained in a first mean plane of the device. The device also includes a hinging element that connects the first portion and the second portion and that is stressed flexurally and a sensing element that extends between the first portion and the second portion and that deforms during the movement of the second portion. Finally, the device includes two blades that extend perpendicularly to the mean plane of the hinge device and parallel to the axis of rotation, the blades being placed between the hinging element and the sensing element and connecting the first portion and the second portion and being stressed torsionally during the movement of the second portion.
    Type: Application
    Filed: November 9, 2017
    Publication date: April 22, 2021
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Loic JOET, Audrey BERTHELOT
  • Patent number: 10968096
    Abstract: Microelectromechanical sensor with an out-of-plane detection has a cross sensitivity in a first direction in the plane with a value of ST, the sensor comprising a support, a mass suspended from the support by beams stressed by bending, in such a way that the inertial mass is capable of moving with respect to the support about an axis of rotation contained in a plane of the sensor, a stress gauge suspended between the mass and the support. The bending beams have a dimension tf in the out-of-plane direction and the mass has a dimension tM in the out-of-plane direction such that t f = 3 4 ? ( t M - 2 ? l arm ? S T ) . Larm is the distance between the centre of gravity of the mass and the centre of the bending beams projected onto the first direction.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: April 6, 2021
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Loic Joet, Patrice Rey
  • Publication number: 20210021944
    Abstract: A mechanical connection is provided for a microelectromechanical and/or nanoelectromechanical device for measuring a variation in pressure. The device includes a fixed component extending in a main plane, a mobile component to move or deform in an out-of-plane direction under effect of a variation in pressure, and a detector of movement or deformation having at least one mobile element.
    Type: Application
    Filed: July 14, 2020
    Publication date: January 21, 2021
    Inventor: Loïc JOET
  • Publication number: 20210018378
    Abstract: A mechanical link for a microelectromechanical and/or nanoelectromechanical structure, the structure includes a mobile component, a fixed component extending on a main plane and means for detecting the displacement of the mobile component relative to the fixed component, the mechanical link comprising: a first link linked to the fixed component and to the mobile component and capable of allowing the rotation of the mobile component relative to the fixed component about an axis of rotation; a second link connecting the mobile component to the detection means at a given distance relative to the axis of rotation in a direction at right angles to the axis of rotation; a third link linked to the fixed component and to the detection means, and configured to guide the detection means in translation in a direction of translation in the plane of the fixed component; such that the combination of the second link and of the third link is capable of transforming the rotational movement of the mobile component into a trans
    Type: Application
    Filed: July 13, 2020
    Publication date: January 21, 2021
    Inventors: Loïc JOET, Patrice REY, Thierry VERDOT
  • Patent number: 10807858
    Abstract: A device transmits a movement and a force between a first zone and a second zone which are insulated from one another in a sealed manner. The device includes a planar support, a transmission element that is rotatably movable with respect to the support by a pivot joint having an axis of rotation that is parallel to a plane of the support, an opening in the support through which the transmission element passes and level with which the pivot joint is positioned. The transmission element includes at least one first transmission arm on one side of the plane of the support and one second transmission arm on the other side of the plane of the support, and sealed insulation positioned in the opening, such that it insulates the first zone from the second zone in a sealed manner and allows the rotational movement of the transmission element.
    Type: Grant
    Filed: December 6, 2017
    Date of Patent: October 20, 2020
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Loic Joet
  • Publication number: 20200317505
    Abstract: Hinge for a micromechanical and/or nanomechanical structure comprising a support, a movable part in an out-of-plane direction, said hinge allowing for the out-of-plane displacement of the movable part, the hinge comprising two torsion beams extending along the axis of rotation of the hinge, two bending elements mechanically connecting the movable part and the support and comprising at least one pair of a first and of a second beam parallel with each other and extending in a plane perpendicular to the axis of rotation, the first beam being connected to the support and the second beam being connected to the movable part, the first and second beams being connected to one another by a first connecting element at a longitudinal end, the two beams extending in the same direction from the first connecting element.
    Type: Application
    Filed: April 6, 2020
    Publication date: October 8, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Patrice REY, Loic JOET, Thierry VERDOT
  • Publication number: 20200271733
    Abstract: A magnetic field gradient sensor includes a support and a structure having at least a first and a second mobile element, at least one magnetic sensor, each magnetic sensor being mechanically secured to one of the first and/or second mobile elements so as to be able to apply a mechanical force to the structure in the presence of a magnetic field gradient, a coupler for coupling between the first and second mobile elements so that the structure can be moved in at least one balanced mechanical mode in the presence of a magnetic field gradient, and a sensor for measuring the movement of the structure at least in balanced mode.
    Type: Application
    Filed: November 6, 2018
    Publication date: August 27, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Guillaume JOURDAN, Bertrand DELAET, Loic JOET
  • Publication number: 20200203594
    Abstract: A MicroElectroMechanical System is provided, with an active element configured to carry out an electromechanical function, the active element including, from an upper face to a lower face substantially parallel to the upper face, an active layer, a core layer, and a retention layer, the active layer being configured to, under the effect of a first electric signal, go into a mechanically stressed state, configured to generate a bending of the active element in a direction perpendicular to a front face thereof, and vice versa, the active layer, the core layer, and the retention layer being arranged so that a neutral axis, associated with an elongation of zero in a case of bending of the active element, is located in a volume of one or the other of the core layer and of the retention layer, and the core layer further includes at least 20% recesses in its volume.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 25, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Thierry Hilt, Stephane Fanget, Loic Joet
  • Publication number: 20200200976
    Abstract: Hinge between a first part and a second part of a microelectromechanical system, said system comprising a first element (S) and a second element (M) free to move relative to each other in an out-of-plane direction, said hinge comprising a first rigid part (4), a second part (6) fixed to a first face of the first part (4) by one end and anchored to the second element by a second end, said second part (6) deforming in bending in the out--of-plane direction, a third part (8) fired to a first face of the first part (4) by a second end, and anchored to the first element (S) by a second end, the third part (8) deforming in bending in the out-of-plane direction (Z), and, in an undeformed state the second part (6) and the third part (8) each comprising one face located in the same plane (P2) orthogonal to the out-of-plane direction (Z).
    Type: Application
    Filed: December 19, 2019
    Publication date: June 25, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Samer DAGHER, Loic JOET
  • Publication number: 20200199923
    Abstract: Hinge for a microelectromechanical system, said system comprising a fixed part and at least one part able to move relative to the fixed part along at least an out-of-plane direction, said hinge being intended to suspend the moving part from the fixed part, said hinge comprising a first rigid part, a second part fixed to the first part at one end and intended to be anchored to the fixed part or the moving part, said second part being configured to deform in bending in a first direction, and two third parts fixed to the first part and intended to be anchored to the moving part or the fixed part, the third parts being configured to deform in bending along a second direction orthogonal to the first direction.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 25, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Samer DAGHER, Loic JOET
  • Publication number: 20200102211
    Abstract: Microelectromechanical sensor with an out-of-plane detection has a cross sensitivity in a first direction in the plane with a value of ST, the sensor comprising a support, a mass suspended from the support by beams stressed by bending, in such a way that the inertial mass is capable of moving with respect to the support about an axis of rotation contained in a plane of the sensor, a stress gauge suspended between the mass and the support. The bending beams have a dimension tf in the out-of-plane direction and the mass has a dimension tM in the out-of-plane direction such that tf=¾(tM?2larmST). Larm is the distance between the centre of gravity of the mass and the centre of the bending beams projected onto the first direction.
    Type: Application
    Filed: October 1, 2019
    Publication date: April 2, 2020
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Loic JOET, Patrice REY
  • Publication number: 20200025793
    Abstract: An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis includes a substrate featuring a plane; a mass having a central zone and suspended relative to the substrate; a single lever arm comprising: a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and a second end connected to the mass by means of a second connection adapted to transmit movement in translation of the mass to the lever arm whilst allowing rotation of the lever arm about the rotation axis; the second end of the lever arm being disposed at the level of the central zone of the mass; at least one strain gauge comprising: a first end connected to the substrate, and a second end connected to the lever arm.
    Type: Application
    Filed: July 19, 2019
    Publication date: January 23, 2020
    Inventor: Loïc JOET
  • Publication number: 20190308873
    Abstract: A device transmits a movement and a force between a first zone and a second zone which are insulated from one another in a sealed manner. The device includes a planar support, a transmission element that is rotatably movable with respect to the support by a pivot joint having an axis of rotation that is parallel to a plane of the support, an opening in the support through which the transmission element passes and level with which the pivot joint is positioned. The transmission element includes at least one first transmission arm on one side of the plane of the support and one second transmission arm on the other side of the plane of the support, and sealed insulation positioned in the opening, such that it insulates the first zone from the second zone in a sealed manner and allows the rotational movement of the transmission element.
    Type: Application
    Filed: December 6, 2017
    Publication date: October 10, 2019
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventor: Loic JOET
  • Patent number: 10315916
    Abstract: Microelectromechanical and/or nanoelectromechanical device comprising a support and at least one moveable element so as to be able to be displaced translationally with respect to the support, a means (G1) for translationally guiding said element, said guiding means (G1) comprising two rigid arms (6), a rotating articulation (12, 10) between each arm (6, 8) and the moveable element (4) and a rotating articulation (10, 14) between each arm (6, 8) and the support, the guiding means (G1) also comprising a coupling articulation (18) between the two arms having at least rotating articulation, said rotating articulations having axes of rotation at least parallel with each other such that during a translational displacement of the moveable element (4) the arms (6, 8) pivot with respect to each other in opposite directions, the rotating articulations being made by torsionally deformable beams.
    Type: Grant
    Filed: June 14, 2018
    Date of Patent: June 11, 2019
    Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Federico Maspero, Loic Joet
  • Patent number: 10257615
    Abstract: Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: April 9, 2019
    Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
    Inventor: Loic Joet
  • Publication number: 20180362333
    Abstract: Microelectromechanical and/or nanoelectromechanical device comprising a support and at least one moveable element so as to be able to be displaced translationally with respect to the support, a means (G1) for translationally guiding said element, said guiding means (G1) comprising two rigid arms (6), a rotating articulation (12, 10) between each arm (6, 8) and the moveable element (4) and a rotating articulation (10, 14) between each arm (6, 8) and the support, the guiding means (G1) also comprising a coupling articulation (18) between the two arms having at least rotating articulation, said rotating articulations having axes of rotation at least parallel with each other such that during a translational displacement of the moveable element (4) the arms (6, 8) pivot with respect to each other in opposite directions, the rotating articulations being made by torsionally deformable beams.
    Type: Application
    Filed: June 14, 2018
    Publication date: December 20, 2018
    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
    Inventors: Federico MASPERO, Loic JOET