Abstract: A micromachined mechanism for a sensing tool includes a support, a probe pivotally mounted with respect to the support, and a beam connected to the support and the probe. The probe is configured to apply a load (Ftool) on a body and to be subjected to a counter-reaction contact force exerted by the body in reaction to the load. The beam is configured to shift from an undeformed position to a deformed position when the contact force of the body is greater than a predetermined threshold force (Fcrit) for which the beam buckles.

Abstract: Disclosed is a flexure pivot based system being one of: a force sensor, a force limiting device arranged to exert a predetermined threshold force, a torque limiting device arranged to exert a predetermined threshold torque, a programmable mechanical memory, or an accelerometer, the flexure pivot based system including a substantially rigid frame supporting a lever by a suspension mechanism including: a first flexure extending from the frame to a junction with the lever; a second flexure extending from the frame to the junction at a first non-zero angle to the first flexure in a neutral position of the suspension mechanism; and a third flexure extending from the junction to a preloading system at a second non-zero angle to the first flexure and/or the second flexure in the neutral position, the preloading system applying a force in a direction substantially coaxial with the third flexure.