Patents by Inventor Long-Chi Yang

Long-Chi Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7238283
    Abstract: A new and improved wastewater treatment system suitable for the treatment of wastewater from a CMP process. A holding tank receives wastewater from a CMP wastewater collection tank. The holding tank may further receive wastewater from a backside grinding (BG) wastewater collection tank. A reaction tank receives wastewater from the holding tank. A coagulant polymer binds to the slurry particles in the reaction tank to precipitate the slurry particles out of solution. One or a pair of clarifiers receives the wastewater from the reaction tank, and the polymer-bound slurry particles are separated from the wastewater in the clarifier or clarifiers. An effluent collection tank receives the purified wastewater from the clarifier or clarifiers. The purified wastewater may be pumped to a storage tank such as a reused city water (RCW) tank for use in scrubber cleaning processes, for example.
    Type: Grant
    Filed: December 4, 2003
    Date of Patent: July 3, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Chung-Ling Wu, Chih-Hsiung Chen, I-Shin Tang, Wen-Honh Lee, Chang-Tzong Chen, E-Cheng Su, Long-Chi Yang
  • Publication number: 20050121394
    Abstract: A new and improved wastewater treatment system suitable for the treatment of wastewater from a CMP process. A holding tank receives wastewater from a CMP wastewater collection tank. The holding tank may further receive wastewater from a backside grinding (BG) wastewater collection tank. A reaction tank receives wastewater from the holding tank. A coagulant polymer binds to the slurry particles in the reaction tank to precipitate the slurry particles out of solution. One or a pair of clarifiers receives the wastewater from the reaction tank, and the polymer-bound slurry particles are separated from the wastewater in the clarifier or clarifiers. An effluent collection tank receives the purified wastewater from the clarifier or clarifiers. The purified wastewater may be pumped to a storage tank such as a reused city water (RCW) tank for use in scrubber cleaning processes, for example.
    Type: Application
    Filed: December 4, 2003
    Publication date: June 9, 2005
    Inventors: Chung-Ling Wu, Chih-Hsiung Chen, I-Shin Tang, Wen-Honh Lee, Chang-Tzong Chen, E-Cheng Su, Long-Chi Yang