Abstract: Within an apparatus for storing a liquid, there is first included a storage tank. The storage tank has formed integral thereto and in fluid communication therewith a liquid inlet port and a liquid outlet port. The storage tank also has formed integral thereto and in fluid communication therewith a gas inlet port and a gas outlet port. Finally, the gas outlet port has connected thereto and in fluid communication therewith a floating plug valve. The floating plug valve comprises a first plug movably positioned over and sealing a first aperture within the floating plug valve such that a first weight of the first plug and a first area of the first aperture define an upper operating pressure of a gas introduced into the storage tank through the gas inlet port. The apparatus of the present invention also contemplates a floating plug valve employed within the apparatus of the present invention.

Abstract: A static mixer for a viscous liquid for use in a chemical mechanical polishing process is provided. The static mixer is constructed of an elongated cylindrical tank, an elongated cylindrical mixing sleeve having a multiplicity of mixing apertures therethrough situated inside the tank, a plurality of curvilinear feed tubes situated at a top of the tank cavity for feeding a mixture of a viscous liquid and a solvent into the tank cavity, a spiral plate mounted on the interior surface of the tank wall extending continuously from a top wall to a bottom wall of the tank cavity, and an outlet tube that is situated at the bottom of the tank cavity inside the mixing sleeve for outputting a mixture.

Abstract: An apparatus and a method for supplying uninterrupted gas by using an automatic switching gas supply system are provided. In the apparatus, a main gas supply source and at least one back-up gas supply source are provided which are connected by a plurality of conduits to a process tool. The conduits further include pressure regulators such that a gas pressure from the main gas supply source is always regulated at about 0.5 Kg/cm2˜1 Kg/cm2 higher than a gas pressure from the back-up gas supply source. The apparatus operates by pneumatic means so that no electric power is required. The apparatus further operates automatically by switching from the main gas supply source to the back-up gas supply source when the pressure drop in the main gas supply source exceeds the pressure differential that is preset in the system, e.g., between about 0.5 Kg/cm2 and about 1 Kg/cm2. Any other suitable range of pressure differential may also be used depending on the type of gases transported and the conduits used.

Abstract: A mechanical wet air generator which is constructed by an inner container, an outer container, a fluid level controller and a multiplicity of Rashing rings filled in the inner container is provided. In the wet air generator, the inner container is formed of honeycomb panels such that large bubbles cannot go through and furthermore, the multiplicity of Rashing rings functions as bubble-breaking solid shapes further prevents large bubbles from exiting the wet air generator and insuring the proper functioning of the generator. The present invention novel mechanical wet air generator is provided with a fluid level controller which consists of a floater, a floating valve, and a linkage connecting thereinbetween. The novel fluid level controller effectively prevents any possibility of overflow of fluid, or water, into a slurry supply pipe to which the wet air generator supplies a wet air or wet N2 for transporting and for blanketing the slurry solution.