Abstract: An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

Abstract: A dynamic thermochemical module is disclosed which includes an array of reactors, a network of interconnecting pipes and valves connected to each reactor in the array so that every reactor within the array can communicate to one another and other reactors in a different module having the same structure, a plurality of storage tanks connected to each reactor and interconnecting tubes and valves so that an output from each reactor is stored therein and distributed to each reactor in the array, a plurality of sub-functional modules connected to the array of reactors via the network of interconnecting tubes and valves, a plurality of condensers connected to the array of reactors, and a plurality of gas conditioning and storage and distribution sub-modules connected to the outputs of the condensers.

Abstract: A dynamic thermochemical module is disclosed which includes an array of reactors, a network of interconnecting pipes and valves connected to each reactor in the array so that every reactor within the array can communicate to one another and other reactors in a different module having the same structure, a plurality of storage tanks connected to each reactor and interconnecting tubes and valves so that an output from each reactor is stored therein and distributed to each reactor in the array, a plurality of sub-functional modules connected to the array of reactors via the network of interconnecting tubes and valves, a plurality of condensers connected to the array of reactors, and a plurality of gas conditioning and storage and distribution sub-modules connected to the outputs of the condensers.