Patents by Inventor Long Di
Long Di has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12665177Abstract: Apparatuses and systems for damping vibration of a vacuum vessel mounted with a pump include a pump body and a damping element coupled to the pump body, wherein the pump body and the damping element form a mass-based damper, and wherein the pump body forms a mass component of the mass-based damper; and the damping element forms a damping component of the mass-based damper. The apparatuses and systems also include a pump body configured to be secured to a column of a charged-particle inspection apparatus, a sensor coupled to the pump body, an actuator coupled to the pump body, and a circuitry communicatively coupled to the sensor and the actuator for receiving motion data indicative of a vibration of the column; determining a damping based on the motion data; and actuate the actuator to react to the vibration of the column in accordance with the damping.Type: GrantFiled: February 4, 2021Date of Patent: June 23, 2026Assignee: ASML Netherlands B.V.Inventors: Chenxi Fu, Long Di, Lucas Kuindersma, Kuo-Feng Tseng, Peter Paul Hempenius, Yu Liu, Ying Luo
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Publication number: 20260081095Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.Type: ApplicationFiled: November 26, 2025Publication date: March 19, 2026Applicant: ASML Netherlands B.V.Inventors: Ying LUO, Zhonghua DONG, Xuehui YIN, Long DI, Nianpei DENG, Wei FANG, Lingling PU, Ruochong FEI, Bohang ZHU, Yu LIU
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Patent number: 12505974Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.Type: GrantFiled: December 19, 2019Date of Patent: December 23, 2025Assignee: ASML Netherlands B.V.Inventors: Ying Luo, Zhonghua Dong, Xuehui Yin, Long Di, Nianpei Deng, Wei Fang, Lingling Pu, Ruochong Fei, Bohang Zhu, Yu Liu
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Patent number: 12318204Abstract: A urine collecting and analyzing apparatus for a toilet, the apparatus including a housing with a seat riser that mounts to the toilet rim and a measurement chamber that extends downwardly into the bowl, a urine collecting basin, a flushing system to clean the apparatus, and a controller for data processing and transmission. The basin has a bowl shape to collect urine for testing and is composed of two side panels or two side panels and a front panel. The panels are moved between a storage position along the housing and a collecting position forming the basin by a motorized mechanism. A transfer tube with a flow rate sensor and pump connects the basin to the measurement chamber. The flushing system feeds water through a flushing tube into the basin through an array of nozzles and cleans the entire surface of the basin.Type: GrantFiled: April 17, 2023Date of Patent: June 3, 2025Inventors: Cao Dong, Long Di, Cheng Yang, Longze Chen
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Publication number: 20250120634Abstract: A urine collecting and analyzing apparatus for a toilet. the apparatus including a housing with a seat riser that mounts to the toilet rim and a measurement chamber that extends downwardly into the bowl. a urine collecting basin. a flushing system to clean the apparatus. and a controller for data processing and transmission. The basin has a bowl shape to collect urine for testing and is composed of two side panels or two side panels and a front panel. The panels are moved between a storage position along the housing and a collecting position forming the basin by a motorized mechanism. A transfer tube with a flow rate sensor and pump connects the basin to the measurement chamber. The flushing system feeds water through a flushing tube into the basin through an array of nozzles and cleans the entire surface of the basin.Type: ApplicationFiled: April 17, 2023Publication date: April 17, 2025Inventors: Cao Dong, Long Di, Cheng Yang, Longze Chen
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Publication number: 20230114067Abstract: Apparatuses and systems for damping vibration of a vacuum vessel mounted with a pump include a pump body and a damping element coupled to the pump body, wherein the pump body and the damping element form a mass-based damper, and wherein the pump body forms a mass component of the mass-based damper; and the damping element forms a damping component of the mass-based damper. The apparatuses and systems also include a pump body configured to be secured to a column of a charged-particle inspection apparatus, a sensor coupled to the pump body, an actuator coupled to the pump body, and a circuitry communicatively coupled to the sensor and the actuator for receiving motion data indicative of a vibration of the column; determining a damping based on the motion data; and actuate the actuator to react to the vibration of the column in accordance with the damping.Type: ApplicationFiled: February 4, 2021Publication date: April 13, 2023Applicant: ASML Netherlands B.V.Inventors: Long DI, Chenxi FU, Lucas KUINDERSMA, Kuo-Feng TSENG, Peter Paul HEMPENIUS, Yu LIU, Ying LUO
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Publication number: 20220068590Abstract: Systems and methods for irradiating a sample with a charged-particle beam are disclosed. The charged-particle beam system may comprise a stage configured to hold a sample and is movable in at least one of X-Y-Z axes. The charged-particle beam system may further comprise a position sensing system to determine a lateral and vertical displacement of the stage, and a beam deflection controller configured to apply a first signal to deflect a primary charged-particle beam incident on the sample to at least partly compensate for the lateral displacement, and to apply a second signal to adjust a focus of the deflected charged-particle beam incident on the sample to at least partly compensate for the vertical displacement of the stage. The first and second signals may comprise an electrical signal having a high bandwidth in a range of 10 kHz to 50 kHz, and 50 kHz to 200 kHz, respectively.Type: ApplicationFiled: December 19, 2019Publication date: March 3, 2022Inventors: Ying LUO, Zhonghua DONG, Xuehui YIN, Long DI, Nianpei DENG, Wei FANG, Lingling PU, Ruochong FEI, Bohang ZHU, Yu LIU
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Patent number: 10758169Abstract: A urine collecting and analyzing apparatus that mounts on a toilet. The apparatus has a housing that mounts to or is integrated into the rim of the toilet bowl and has an opening for access to the bowl. The housing has a collector compartment and a controller compartment. A collector cup fits under the collector compartment extends over the bowl in a retracted position and in a collecting position. When in the collecting position, the cup captures urine released by a user. The cup is connected to a measurement chamber by a transfer tube. The urine moves through the transfer tube from the cup to the measurement chamber to a predetermined threshold volume and level. A controller in the controller compartment reads sensors and transmits sensor data to a device for storage and display.Type: GrantFiled: October 30, 2018Date of Patent: September 1, 2020Inventors: Cheng Yang, Long Di, Longze Chen, Cao Dong
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Publication number: 20200205717Abstract: A urine collecting and analyzing apparatus that mounts on a toilet. The apparatus has a housing that mounts to or is integrated into the rim of the toilet bowl and has an opening for access to the bowl. The housing has a collector compartment and a controller compartment. A collector cup fits under the collector compartment extends over the bowl in a retracted position and in a collecting position. When in the collecting position, the cup captures urine released by a user. The cup is connected to a measurement chamber by a transfer tube. The urine moves through the transfer tube from the cup to the measurement chamber to a predetermined threshold volume and level. A controller in the controller compartment reads sensors and transmits sensor data to a device for storage and display.Type: ApplicationFiled: October 30, 2018Publication date: July 2, 2020Inventors: Cheng Yang, Long Di, Longze Chen, Cao Dong