Abstract: A process tool monitoring system is disclosed including a retrieving module, a calculating module, and an output module. The retrieving module retrieves parameter data from a process tool. Where the process tool is a furnace, the parameter data may include furnace temperature data, times of day that wafers were loaded into the furnace, and times of day that wafers were unloaded from the furnace. The retrieving module stores the parameter data in a database, and the calculating module accesses the parameter data within the database, and calculates a present throughput data dependent upon the parameter data, wherein the present throughput data is indicative of a present throughput of the process tool. The output module provides the present throughput data to an operator of the process tool. The process tool monitoring system may be used to monitor multiple process tools, and to compare the throughputs of the multiple process tools.

Abstract: The present invention provides a throughput monitoring and analysis system and method, comprising: a factor-fetching means and a terminal means. Wherein the factor-fetching means fetches a plurality of raw time data of the production factors corresponding to selected operation events during execution of operation events of the complex machine. The terminal means stores the time data and related information of the production factors and displaying the monitoring results according to set required condition and the data and information.

Abstract: A process tool monitoring system is disclosed including a retrieving module, a calculating module, and an output module. The retrieving module retrieves parameter data from a process tool. Where the process tool is a furnace, the parameter data may include furnace temperature data, times of day that wafers were loaded into the furnace, and times of day that wafers were unloaded from the furnace. The retrieving module stores the parameter data in a database, and the calculating module accesses the parameter data within the database, and calculates a present throughput data dependent upon the parameter data, wherein the present throughput data is indicative of a present throughput of the process tool. The output module provides the present throughput data to an operator of the process tool. The process tool monitoring system may be used to monitor multiple process tools, and to compare the throughputs of the multiple process tools.

Abstract: The present invention provides a throughput monitoring and analysis system and method, comprising: a factor-fetching means and a terminal means. Wherein the factor-fetching means fetches a plurality of raw time data of the production factors corresponding to selected operation events during execution of operation events of the complex machine. The terminal means stores the time data and related information of the production factors and displaying the monitoring results according to set required condition and the data and information.