Patents by Inventor Long Huy Buil

Long Huy Buil has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210062045
    Abstract: A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish.
    Type: Application
    Filed: August 27, 2020
    Publication date: March 4, 2021
    Inventors: Lin FU, Jason A. Sherlock, Long Huy Buil, Douglas E. Ward