Patents by Inventor Lonnie W. McCormick

Lonnie W. McCormick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for processing workpieces
    Patent number: 4717461
    Abstract: A method of processing a plurality of semiconductor wafers from a wafer cassette including a wafer transfer housing and one or more processing chambers. A wafer is removed from its cassette and transported through the transfer housing into one or more processing chambers for etching, deposition or other such operations. The processed wafer is replaced into its cassette after being transported back through the wafer transfer housing.
    Type: Grant
    Filed: September 15, 1986
    Date of Patent: January 5, 1988
    Assignee: Machine Technology, Inc.
    Inventors: Thomas L. Strahl, Lawrence T. Lamont, Jr., Carl T. Peterson, Hobart A. Brown, Lonnie W. McCormick, Roderick C. Mosely