Patents by Inventor Loren Linholm

Loren Linholm has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrical test structure and method for measuring the relative locations of conducting features on an insulating substrate
    Patent number: 5383136
    Abstract: A test structure for submicrometer metrology as used in integrated circuit manufacture comprises a bridge conductor divided into three segments by pairs of voltage taps. A first segment has no intermediate taps; a second segment has a number of dummy taps intermediate its ends; and a third segment has a single central tap, which may typically be formed in a different step than the remainder of the test structure, intermediate its ends. Preferably, the central tap extends from the same side of the bridge conductor as the taps at the ends of the third segment thereof. In order to evaluate a manufacturing operation, for example, to monitor the accuracy of registration of successive manufacturing steps, test signals are applied successively between the pairs of pads.
    Type: Grant
    Filed: March 13, 1992
    Date of Patent: January 17, 1995
    Assignee: The United States of America as represented by the Secretary of Commerce
    Inventors: Michael Cresswell, Richard Allen, Loren Linholm, Michael Gaitan
  • Linewidth micro-bridge test structure
    Patent number: 5247262
    Abstract: A test structure pattern and method for processing the electrical data extracted from the pattern which allows for the measurement of a short line with a precision on the order of 10 nanometers.
    Type: Grant
    Filed: March 13, 1992
    Date of Patent: September 21, 1993
    Assignee: The United States of America as represented by the Secretary of Commerce
    Inventors: Michael Cresswell, Richard Allen, Loren Linholm