Patents by Inventor Loren R. Blanchard

Loren R. Blanchard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad conditioning apparatus for wafer planarization process
    Patent number: 5216843
    Abstract: An improved apparatus for polishing a thin film formed on a semiconductor substrate includes a rotatable table covered with a polishing pad. The table and the pad are then rotated relative to the substrate which is pressed down against the pad surface during the polishing process. Means is provided for generating a plurality of grooves in the pad while substrates are being polished. The continually formed grooves help to facilitate the polishing process by channeling slurry between the substrate and the pad.
    Type: Grant
    Filed: September 24, 1992
    Date of Patent: June 8, 1993
    Assignee: Intel Corporation
    Inventors: Joseph R. Breivogel, Loren R. Blanchard, Matthew J. Prince