Patents by Inventor Lorenzo VINCIGUERRA

Lorenzo VINCIGUERRA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing a stacked piezoelectric transducer, and piezoelectric transducer
    Patent number: 11433669
    Abstract: A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.
    Type: Grant
    Filed: May 20, 2020
    Date of Patent: September 6, 2022
    Assignee: STMicroelectronics S.r.l.
    Inventors: Davide Assanelli, Irene Martini, Lorenzo Vinciguerra, Carla Maria Lazzari, Paolo Ferrarini
  • MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURING PROCESS THEREOF
    Publication number: 20220119245
    Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.
    Type: Application
    Filed: October 12, 2021
    Publication date: April 21, 2022
    Applicant: STMicroelectronics S.r.l.
    Inventors: Nicolo' BONI, Lorenzo VINCIGUERRA, Roberto CARMINATI, Massimiliano MERLI
  • METHOD OF MANUFACTURING A STACKED PIEZOELECTRIC TRANSDUCER, AND PIEZOELECTRIC TRANSDUCER
    Publication number: 20200369029
    Abstract: A piezoelectric transducer includes a semiconductor body with a bottom electrode of conductive material. A piezoelectric element is on the bottom electrode. A first protective layer, on the bottom electrode and the piezoelectric element, has a first opening through which a portion of the piezoelectric element is exposed, and a second opening through which a portion of the bottom electrode is exposed. A conductive layer on the first protective layer and within the first and second openings is patterned to form a top electrode in electrical contact with the piezoelectric element at the first opening, a first biasing stripe in electrical contact with the top electrode, and a second biasing stripe in electrical contact with the bottom electrode at the second opening.
    Type: Application
    Filed: May 20, 2020
    Publication date: November 26, 2020
    Applicant: STMicroelectronics S.r.l.
    Inventors: Davide ASSANELLI, Irene MARTINI, Lorenzo VINCIGUERRA, Carla Maria LAZZARI, Paolo FERRARINI