Patents by Inventor Loretta Cordrey

Loretta Cordrey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective etching silicon nitride
    Publication number: 20050159011
    Abstract: By providing a silicon containing precursor, such as methyl triethoxysilane, to a phosphoric etch bath, wafers containing nitride may be selectively etched without unduly impacting other silicon containing underlying layers.
    Type: Application
    Filed: January 21, 2004
    Publication date: July 21, 2005
    Inventors: Vani Thirumala, Nabil Mistkawi, Bruce Beattie, John O'Sullivan, Huiying Liu, Noriko Oshiro, Hokkin Choi, Loretta Cordrey