Patents by Inventor Lori A. Peters

Lori A. Peters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process control system using feed forward control threads based on material groups
    Patent number: 6148239
    Abstract: A process control system using feed forward control threads based on material groups performs material tracking to account and adjust for variability of processing in a process flow that includes multiple machines, machine configurations, and machine setups. The process control system using feed forward control threads based on material groups distinguishes variations in processing parameters and characteristics for processed material samples and modifies processing at subsequent steps in response to the variations. The process control system using feed forward control threads based on material groups controls materials groups so that material samples with a like processing history are processed with a similar machine configuration or setup for subsequent processing steps.
    Type: Grant
    Filed: December 12, 1997
    Date of Patent: November 14, 2000
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Merritt L. Funk, Lori A. Peters