Patents by Inventor Lothar LIPPERT

Lothar LIPPERT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8758579
    Abstract: A chamber for physical vapor deposition is provided. The chamber includes a housing, a door for opening and closing the housing, and a bearing for receiving a target, wherein the bearing is oriented in a first direction. Further, the chamber is adapted so that the target is at least partially removable from the chamber in the first direction. According to an embodiment, a chamber for physical vapor deposition is provided. The chamber is adapted for receiving at least one target and a substrate. The chamber includes a housing, a door, and at least one bearing for mounting the target, wherein the bearing is attached to the door.
    Type: Grant
    Filed: May 17, 2010
    Date of Patent: June 24, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Reiner Hinterschuster, Lothar Lippert
  • Publication number: 20120037503
    Abstract: A rotatable target base device for sputtering installations is provided, wherein the target base device is adapted for receiving thereon a solid target cylinder, the rotatable target base device comprising a target base cylinder (4) having a lateral surface (3), a middle part (12), a first end region (7) and a second end region (9) opposite to the first end region, wherein at least one of the first and the second end regions has a maximum outer diameter substantially equal to or less than the outer diameter of the middle part.
    Type: Application
    Filed: October 23, 2009
    Publication date: February 16, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Lothar Lippert, Oliver Heimel
  • Publication number: 20110278166
    Abstract: A chamber for physical vapour deposition is provided. The chamber includes a housing, a door for opening and closing the housing, and a bearing for receiving a target, wherein the bearing is oriented in a first direction. Further, the chamber is adapted so that the target is at least partially removable from the chamber in the first direction. According to an embodiment, a chamber for physical vapour deposition is provided. The chamber is adapted for receiving at least one target and a substrate. The chamber includes a housing, a door, and at least one bearing for mounting the target, wherein the bearing is attached to the door.
    Type: Application
    Filed: May 17, 2010
    Publication date: November 17, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Reiner HINTERSCHUSTER, Lothar LIPPERT
  • Publication number: 20110220489
    Abstract: A rotatable target for a sputtering installation and a method for producing a rotatable target are provided. The target includes a backing tube to which a target tube is shrink-fitted. The method includes setting a positive temperature difference between a target tube and a backing tube. The method further includes pulling the target tube over the backing tube while the temperature difference remains positive. Furthermore, a backing tube having a middle part with an outer lateral area and a notch extending in a longitudinal direction on the outer lateral area is provided.
    Type: Application
    Filed: March 12, 2010
    Publication date: September 15, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Lothar Lippert, Wolfgang Buschbeck
  • Publication number: 20110062028
    Abstract: An apparatus for electroplating one or more surfaces (2,3) on one or more substrates (1), especially solar cells (1a), is described. The apparatus includes an electrochemical coating bath (13), which has a coating tank (12) filled with an electrochemical coating liquid (14). The apparatus also includes a conveying device (15) for transporting the substrate through the coating bath (13), a light source circuit (60) with light sources (64) for irradiating the substrate (1) and an electrolytic cell rectifier circuit (50) for the substrate with anodes (54). The apparatus is characterized by a device for generating synchronous current pulses and light pulses, so that during a time interval between the current pulses the irradiating of the substrate or substrates is interrupted. A process for electrochemical plating of the surface of the substrate or substrates is also described.
    Type: Application
    Filed: September 16, 2010
    Publication date: March 17, 2011
    Inventors: Lothar Lippert, Stefan Dauwe
  • Publication number: 20110062030
    Abstract: The electrolyte composition is used in a method of depositing metals, in particular, onto substrates, especially solar cells. The electrolyte composition is particularly suitable for the deposition of metals, in particular silver, onto solar cells. The electrolyte composition is preferably free of cyanides and contains at least one metal, preferably silver, and an iminodisuccinate derivative, preferably a sodium or postassium iminodisuccinate.
    Type: Application
    Filed: September 9, 2010
    Publication date: March 17, 2011
    Inventors: Lothar Lippert, Stefan Dauwe
  • Publication number: 20100101948
    Abstract: A rotatable target base device for sputtering installations is provided, wherein the target base device is adapted for receiving thereon a solid target cylinder, the rotatable target base device comprising a target base cylinder having a lateral surface, a middle part, a first end region and a second end region opposite to the first end region, wherein at least one of the first and the second end regions has a maximum outer diameter substantially equal to or less than the outer diameter of the middle part.
    Type: Application
    Filed: October 24, 2008
    Publication date: April 29, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Lothar LIPPERT, Oliver HEIMEL