Patents by Inventor Louis H. Breaux

Louis H. Breaux has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming an isolation structure by performing multiple high-density plasma depositions
    Patent number: 7799632
    Abstract: One embodiment of the present invention relates to a method of forming an isolation structure. During this method, an isolation trench is formed within a semiconductor body. After this trench is formed, it is filled by performing multiple high-frequency plasma depositions to deposit multiple dielectric layers over the semiconductor body. A first of the multiple layers is deposited at a high-frequency power of between approximately 100 watts and approximately 900 watts.
    Type: Grant
    Filed: January 17, 2007
    Date of Patent: September 21, 2010
    Assignee: Texas Instruments Incorporated
    Inventors: Jin Zhao, Manuel Quevedo-Lopez, Louis H. Breaux
  • Shallow trench isolation devices and methods
    Publication number: 20080157264
    Abstract: One embodiment of the present invention relates to a method of forming an isolation structure. During this method, an isolation trench is formed within a semiconductor body. After this trench is formed, it is filled by performing multiple high-frequency plasma depositions to deposit multiple dielectric layers over the semiconductor body. A first of the multiple layers is deposited at a high-frequency power of between approximately 100 watts and approximately 900 watts.
    Type: Application
    Filed: January 17, 2007
    Publication date: July 3, 2008
    Inventors: Jin Zhao, Manuel Quevedo-Lopez, Louis H. Breaux