Patents by Inventor Louis S. Farkas, III

Louis S. Farkas, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion sources, systems and methods
    Patent number: 9236225
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: January 12, 2016
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • ION SOURCES, SYSTEMS AND METHODS
    Publication number: 20150213997
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: April 13, 2015
    Publication date: July 30, 2015
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • ION SOURCES, SYSTEMS AND METHODS
    Publication number: 20140306121
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: May 23, 2014
    Publication date: October 16, 2014
    Applicant: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Ion beam stabilization
    Patent number: 8563954
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Grant
    Filed: December 23, 2011
    Date of Patent: October 22, 2013
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • ION SOURCES, SYSTEMS AND METHODS
    Publication number: 20120141693
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: January 24, 2012
    Publication date: June 7, 2012
    Applicant: ALIS CORPORATION
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • ION BEAM STABILIZATION
    Publication number: 20120097849
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Application
    Filed: December 23, 2011
    Publication date: April 26, 2012
    Applicant: CARL ZEISS NTS, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • Ion sources, systems and methods
    Patent number: 8110814
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: February 2, 2009
    Date of Patent: February 7, 2012
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Ion beam stabilization
    Patent number: 8093563
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: January 10, 2012
    Assignee: Carl Zeiss NTS, LLC
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • Sample decontamination
    Patent number: 8013300
    Abstract: Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.
    Type: Grant
    Filed: May 21, 2009
    Date of Patent: September 6, 2011
    Assignee: Carl Zeiss NTS, LLC
    Inventors: Lewis A. Stern, Louis S. Farkas, III, Billy W. Ward, William DiNatale, John A. Notte, IV, Lawrence Scipioni
  • Ion sources, systems and methods
    Patent number: 7786451
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: August 31, 2010
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Alexander Groholski, Richard Comunale
  • Ion sources, systems and methods
    Patent number: 7786452
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: August 31, 2010
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7745801
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: June 29, 2010
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Alexander Groholski, Richard Comunale
  • ION BEAM STABILIZATION
    Publication number: 20100051805
    Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.
    Type: Application
    Filed: August 27, 2009
    Publication date: March 4, 2010
    Applicant: CARL ZEISS SMT INC.
    Inventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
  • SAMPLE DECONTAMINATION
    Publication number: 20090314939
    Abstract: Disclosed herein are methods that include: (a) exposing a sample in a chamber to a first gas, where the first gas reacts with surface contaminants on the sample to form a second gas; (b) removing at least a portion of the second gas from the chamber; and (c) exposing the sample to a charged particle beam to cause a plurality of particles to leave the sample and detecting at least some of the plurality of particles. The charged particle beam can include particles having a molecular weight of 40 atomic mass units or less.
    Type: Application
    Filed: May 21, 2009
    Publication date: December 24, 2009
    Applicant: Carl Zeiss SMT Inc.
    Inventors: Lewis A. Stern, Louis S. Farkas, III, Billy W. Ward, William DiNatale, John A. Notte, IV, Lawrence Scipioni
  • Systems and methods for a gas field ion microscope
    Patent number: 7601953
    Abstract: In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.
    Type: Grant
    Filed: March 20, 2006
    Date of Patent: October 13, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, Louis S. Farkas, III, John A. Notte, IV, Randall G. Percival
  • ION SOURCES, SYSTEMS AND METHODS
    Publication number: 20090179161
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: February 2, 2009
    Publication date: July 16, 2009
    Inventors: BILLY W. WARD, JOHN A. NOTTE, IV, LOUIS S. FARKAS, III, RANDAL G. PERCIVAL, RAYMOND HILL, KLAUS EDINGER, LARS MARKWORT, DIRK ADERHOLD, ULRICH MANTZ
  • Ion sources, systems and methods
    Patent number: 7557360
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Lars Markwort, Dirk Aderhold
  • Ion sources, systems and methods
    Patent number: 7557361
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7557359
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
  • Ion sources, systems and methods
    Patent number: 7557358
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: November 15, 2006
    Date of Patent: July 7, 2009
    Assignee: ALIS Corporation
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill