Abstract: A positioning device and method for moving a positioning stage is provided. The device includes a movable stage, at least one actuator, and the same number of sensors as there are actuators. Each actuator is placed such that it applies a force along a line parallel to the line of movement of the positioning stage. Each actuator can be operated to generate an input force for moving the movable stage. A sensor is placed along the force line of each included actuator. Each sensor detects movement of the positioning stage. A first force is applied to a first location on the positioning stage. A second force is applied to a second location on the positioning stage. Application of the first and the second forces moves the positioning stage. The first location and the second location are symmetrically located about an axis of the positioning stage.

Abstract: A stylus profiling apparatus and method maintains constant separation, and thus constant force, between a conductive cantilever beam which extends over a conductive portion of a base and which is positioned in spaced apart relation therefrom. In particular, a piezoelectric actuator is coupled to the base and is controlled to move the base relative to the free end of the cantilever beam so as to maintain constant spacing, and thus constant force, therebetween when a stylus on the free end is moved by a surface profile. A capacitor having a pair of plates, at least one of which is coupled to the piezoelectric actuator, produces an electrical signal in response to the displacement of the actuator to provide measurement of the surface profile. The base is preferably of trapezoidal cross section and includes electrical pads on one side thereof. A probe holder includes a mating shoulder and electrical contacts for cooperatively mating with the electrical pads.