Patents by Inventor Lu-Chih LIN

Lu-Chih LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RETICLE CARRIER AND METHOD FOR MANUFACTURING AUXILIARY STRUCTURE IN RETICLE CARRIER
    Publication number: 20250201610
    Abstract: A reticle carrier includes an inner pod, a first auxiliary structure, and an outer pod. The inner pod is configured to receive a reticle. The inner pod comprises an inner baseplate and an inner cover plate, and an inner surface of the inner baseplate and an inner surface of the inner cover plate face each other. The first auxiliary structure is on one of the inner surface of the inner baseplate and the inner surface of the inner cover plate. The first auxiliary structure includes a raised structure and a contact pattern on the raised structure, and the contact pattern includes a plurality of parallel strips. The outer pod houses the inner pod.
    Type: Application
    Filed: January 5, 2024
    Publication date: June 19, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Lu-Chih LIN, Pei-Cheng HSU, Ta-Cheng LIEN, Tran-Hui SHEN, Tzu-Yi WANG, Hsin-Chang LEE