Patents by Inventor Lu LIN

Lu LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9564396
    Abstract: A metal first, via first process for forming interconnects within a metallization layer of a semiconductor device is provided. In an embodiment a conductive material is deposited and the conductive material is patterned into a conductive line and a via. A dielectric material is deposited over the conductive line and the via, and the dielectric material and the via are planarized.
    Type: Grant
    Filed: September 26, 2014
    Date of Patent: February 7, 2017
    Assignee: Taiwan Semiconductor Manufucturing Company, Ltd.
    Inventors: Hsiang-Lun Kao, Tien-Lu Lin, Yung-Chih Wang, Yu-Chieh Liao
  • Patent number: 9559134
    Abstract: An image sensor employing deep trench spacing isolation is provided. A plurality of pixel sensors is arranged over or within a semiconductor substrate. A trench is arranged in the semiconductor substrate around and between adjacent ones of the plurality of pixel sensors, and the trench has a gap located between sidewalls of the trench. A cap is arranged over or within the trench at a position overlying the gap. The cap seals the gap within the trench. A method of manufacturing the image sensor is also provided.
    Type: Grant
    Filed: December 9, 2014
    Date of Patent: January 31, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tai-I Yang, Jung-I Lin, Ta-Chun Lin, Tien-Lu Lin, Chen-Jong Wang
  • Publication number: 20170018498
    Abstract: A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A conductive feature over a substrate is provided. A first dielectric layer is deposited over the conductive feature and the substrate. A via-forming-trench (VFT) is formed in the first dielectric layer to expose the conductive feature and the substrate around the conductive feature. The VFT is filled in by a sacrificial layer. A via-opening is formed in the sacrificial layer to expose the conductive feature. A metal plug is formed in the via-opening to connect to the conductive feature. The sacrificial layer is removed to form a surrounding-vacancy around metal plug and the conductive feature. A second dielectric layer is deposited over the substrate to seal a portion of the surrounding-vacancy to form an enclosure-air-gap all around the metal plug and the conductive feature.
    Type: Application
    Filed: September 27, 2016
    Publication date: January 19, 2017
    Inventors: Hsiang-Lun Kao, Tien-Lu Lin, Yung-Chih Wang, Cheng-Chi Chuang
  • Publication number: 20160358817
    Abstract: Conductive element structures and methods of manufacture thereof are disclosed. In some embodiments, a method of forming a conductive element in an insulating layer includes: forming a recess in a metal layer disposed over the insulating layer; selectively forming a metal liner on a sidewall of the recess; and etching a via in the insulating layer using the metal layer and the metal liner as a mask.
    Type: Application
    Filed: August 22, 2016
    Publication date: December 8, 2016
    Inventors: Tai-I Yang, Hsiang-Wei Liu, Chia-Tien Wu, Hsiang-Huan Lee, Tien-Lu Lin
  • Publication number: 20160343606
    Abstract: An aluminum (Al) layer is formed over a semiconductor substrate. A selective portion of the Al layer is removed to form openings. The Al layer is anodized to obtain an alumina dielectric layer with a plurality of pores. The openings are filled with a conductive interconnect material. The pores are widened to form air gaps and a top etch stop layer is formed over the alumina dielectric layer.
    Type: Application
    Filed: August 1, 2016
    Publication date: November 24, 2016
    Inventors: Chia-Tien Wu, Tien-Lu Lin
  • Publication number: 20160334064
    Abstract: A LED illuminating device includes a plurality of LED tubes, electrically connected in series and/or in parallel, and one LED tube driver, separately disposed outside the LED tubes and spaced apart from the LED tubes. The LED tube driver is electrically connected to the plurality of LED tubes through an external extension line. The LED tube driver and each LED tubes can be replaced individually so as to reduce the replacement cost. In addition, the LED tube driver is spaced apart from the LED tube, that the LED tube driver can avoid being damaged because of the heat. The lifetime of the LED tube driver is prolonged and the replacement frequency of the LED tube driver is reduced. Therefore, the LED illuminating device of the present invention has low maintenance cost.
    Type: Application
    Filed: July 13, 2015
    Publication date: November 17, 2016
    Inventor: Hsien-Lu Lin
  • Publication number: 20160310367
    Abstract: A baby bottle includes a container including an externally threaded top having an opening; a cap including a base, an annular inner wall, a hole member through a bottom of a center of a base, an annular outer wall in close proximity to the opening, an annular flange extending outwardly from a top of the annular outer wall to rest upon the externally threaded top, an annular groove defined between and by the inner wall and the outer wall, and an orifice through a bottom of the groove; a teat including two splay holes, and an anti-vacuum skirt on the flange and being in close proximity to the inner wall; and an internally threaded retainer ring secured to the externally threaded top to fasten the container, the teat, and the cap together.
    Type: Application
    Filed: July 4, 2016
    Publication date: October 27, 2016
    Inventor: Chun-Lu Lin
  • Publication number: 20160293729
    Abstract: A semiconductor arrangement and method of formation are provided. The semiconductor arrangement comprises a conductive contact in contact with a substantially planar first top surface of a first active area, the contact between and in contact with a first alignment spacer and a second alignment spacer both having substantially vertical outer surfaces. The contact formed between the first alignment spacer and the second alignment spacer has a more desired contact shape then a contact formed between alignment spacers that do not have substantially vertical outer surfaces. The substantially planar surface of the first active area is indicative of a substantially undamaged structure of the first active area as compared to an active area that is not substantially planar. The substantially undamaged first active area has a greater contact area for the contact and a lower contact resistance as compared to a damaged first active area.
    Type: Application
    Filed: June 10, 2016
    Publication date: October 6, 2016
    Inventors: Tai-I Yang, Tien-Lu Lin, Wai-Yi Lien, Chih-Hao Wang, Jiun-Peng Wu
  • Publication number: 20160284593
    Abstract: The present disclosure relates to a method of forming an interconnect structure. In some embodiments, the method is performed by forming a trench within a first dielectric layer and forming sacrificial spacers along sidewalls of the trench. The trench is filled with a conductive material, and the sacrificial spacers are removed after the trench has been filled with the conductive material. A second dielectric layer is formed over the first dielectric layer to leave an air-gap in a region from which the sacrificial spacers were removed.
    Type: Application
    Filed: June 1, 2016
    Publication date: September 29, 2016
    Inventors: Tai-I Yang, Cheng-Chi Chuang, Yung-Chih Wang, Tien-Lu Lin
  • Patent number: 9455178
    Abstract: A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A conductive feature over a substrate is provided. A first dielectric layer is deposited over the conductive feature and the substrate. A via-forming-trench (VFT) is formed in the first dielectric layer to expose the conductive feature and the substrate around the conductive feature. The VFT is filled in by a sacrificial layer. A via-opening is formed in the sacrificial layer to expose the conductive feature. A metal plug is formed in the via-opening to connect to the conductive feature. The sacrificial layer is removed to form a surrounding-vacancy around metal plug and the conductive feature. A second dielectric layer is deposited over the substrate to seal a portion of the surrounding-vacancy to form an enclosure-air-gap all around the metal plug and the conductive feature.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: September 27, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsiang-Lun Kao, Tien-Lu Lin, Yung-Chih Wang, Cheng-Chi Chuang
  • Patent number: 9425089
    Abstract: Conductive element structures and methods of manufacture thereof are disclosed. In some embodiments, a method of forming a conductive element in an insulating layer includes: forming a recess in a metal layer disposed over the insulating layer; selectively forming a metal liner on a sidewall of the recess; and etching a via in the insulating layer using the metal layer and the metal liner as a mask.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: August 23, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tai-I Yang, Hsiang-Wei Liu, Chia-Tien Wu, Hsiang-Huan Lee, Tien-Lu Lin
  • Publication number: 20160240477
    Abstract: A semiconductor arrangement and method of formation are provided. The semiconductor arrangement includes an interconnect which includes an interconnect metal plug surrounded by a second metal layer. The interconnect is adjacent a sidewall of a dielectric, such that an air gap is between the interconnect and the sidewall of the dielectric. A protective barrier is over the interconnect and the air gap, and is over and in direct physical contact with a top surface of the dielectric. The interconnect metal plug surrounded by the second metal layer is less susceptible to damage than an interconnect metal plug that is not surrounded by a second metal layer. The protective barrier in direct physical contact with the dielectric reduces parasitic capacitance, which reduces an RC delay of the semiconductor arrangement, as compared to a semiconductor arrangement that does not have a protective barrier in direct physical contact with a dielectric.
    Type: Application
    Filed: April 25, 2016
    Publication date: August 18, 2016
    Inventors: Yu-Chieh Liao, Cheng-Chi Chuang, Tai-I Yang, Tien-Lu Lin, Yung-Hsu Wu
  • Patent number: 9412652
    Abstract: An aluminum (Al) layer is formed over a semiconductor substrate. A selective portion of the Al layer is removed to form openings. The Al layer is anodized to obtain an alumina dielectric layer with a plurality of pores. The openings are filled with a conductive interconnect material. The pores are widened to form air gaps and a top etch stop layer is formed over the alumina dielectric layer.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: August 9, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Tien Wu, Tien-Lu Lin
  • Patent number: 9390965
    Abstract: An interconnect structure includes a first low-k dielectric layer formed over a substrate. A first metal line is disposed in the first low-k dielectric layer. The first metal line includes a first conductive body with a first width and an up landing pad with a second width. The first width is smaller than the second width. The interconnect structure further includes a first air-gap adjacent to sidewalls of the first conductive body. The interconnect structure also includes a second low-k dielectric layer formed over the first low-k dielectric layer and a first via in the second low-k dielectric layer and disposed on the up landing pad.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: July 12, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tai-I Yang, Cheng-Chi Chuang, Yung-Chih Wang, Tien-Lu Lin
  • Patent number: 9373544
    Abstract: A semiconductor arrangement and method of formation are provided. The semiconductor arrangement comprises a conductive contact in contact with a substantially planar first top surface of a first active area, the contact between and in contact with a first alignment spacer and a second alignment spacer both having substantially vertical outer surfaces. The contact formed between the first alignment spacer and the second alignment spacer has a more desired contact shape then a contact formed between alignment spacers that do not have substantially vertical outer surfaces. The substantially planar surface of the first active area is indicative of a substantially undamaged structure of the first active area as compared to an active area that is not substantially planar. The substantially undamaged first active area has a greater contact area for the contact and a lower contact resistance as compared to a damaged first active area.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: June 21, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Tai-I Yang, Tien-Lu Lin, Wai-Yi Lien, Chih-Hao Wang, Jiun-Peng Wu
  • Publication number: 20160163749
    Abstract: An image sensor employing deep trench spacing isolation is provided. A plurality of pixel sensors is arranged over or within a semiconductor substrate. A trench is arranged in the semiconductor substrate around and between adjacent ones of the plurality of pixel sensors, and the trench has a gap located between sidewalls of the trench. A cap is arranged over or within the trench at a position overlying the gap. The cap seals the gap within the trench. A method of manufacturing the image sensor is also provided.
    Type: Application
    Filed: December 9, 2014
    Publication date: June 9, 2016
    Inventors: Tai-I Yang, Jung-I Lin, Ta-Chun Lin, Tien-Lu Lin, Chen-Jong Wang
  • Patent number: 9349690
    Abstract: A semiconductor arrangement and method of formation are provided. The semiconductor arrangement includes an interconnect which includes an interconnect metal plug surrounded by a second metal layer. The interconnect is adjacent a sidewall of a dielectric, such that an air gap is between the interconnect and the sidewall of the dielectric. A protective barrier is over the interconnect and the air gap, and is over and in direct physical contact with a top surface of the dielectric. The interconnect metal plug surrounded by the second metal layer is less susceptible to damage than an interconnect metal plug that is not surrounded by a second metal layer. The protective barrier in direct physical contact with the dielectric reduces parasitic capacitance, which reduces an RC delay of the semiconductor arrangement, as compared to a semiconductor arrangement that does not have a protective barrier in direct physical contact with a dielectric.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: May 24, 2016
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Yu-Chieh Liao, Cheng-Chi Chuang, Tai-I Yang, Tien-Lu Lin, Yung-Hsu Wu
  • Patent number: 9349540
    Abstract: The present invention provides a method for manufacturing platinum nanoparticle solution and a self-assembled platinum counter electrode thereof. The present invention adopts a polyol reduction method and controls the reduction reaction periods under various pH conditions. After the platinum nanoparticle dispersion solution of uniformly distributed platinum nanoparticles having small sizes is produced, the self-assembled platinum nanoparticles are adsorbed on a functionalized surface of a conductive substrate by dip coating at the normal temperature. Therefore, the structure of a platinum nanoparticle monolayer is formed, to obtain the self-assembled platinum counter electrode with a homogeneous single layer on the surface. This process is much simpler without adding any stabilizers or surfactants, without involving any subsequent heat treatments, and it consumes less amount of the platinum material.
    Type: Grant
    Filed: July 11, 2014
    Date of Patent: May 24, 2016
    Assignee: National Chiao Tung University
    Inventors: Eric Wei-Guang Diau, Chia-Hung Tsai, Lu-Lin Li, Hsin-Hui Wu
  • Publication number: 20160135112
    Abstract: Disclosed is a router device for transmitting and receiving a networking signal via a network connection. The network connection includes a wireless connection or a wired network connection. The router device comprising: a wireless networking means for transmitting and/or receiving the networking signal within the wireless network connection, a wired networking means for transmitting and receiving the networking signal by a wire within the wired network connection, a memory for storing picture data, and a touch screen for inputting a network configuration of the wireless network connection and/or the wired network connection, for displaying the result of network configuration, and for displaying the picture data.
    Type: Application
    Filed: December 23, 2014
    Publication date: May 12, 2016
    Inventor: Hsien-Lu Lin
  • Publication number: 20160118336
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate. The semiconductor device structure includes a first dielectric layer over the semiconductor substrate. The semiconductor device structure includes a first conductive line embedded in the first dielectric layer. The semiconductor device structure includes a second dielectric layer over the first dielectric layer and the first conductive line. The semiconductor device structure includes a second conductive line over the second dielectric layer. The second dielectric layer is between the first conductive line and the second conductive line. The semiconductor device structure includes conductive pillars passing through the second dielectric layer to electrically connect the first conductive line to the second conductive line. The conductive pillars are spaced apart from each other.
    Type: Application
    Filed: October 27, 2014
    Publication date: April 28, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Tai-I YANG, Yu-Chieh LIAO, Tien-Lu LIN, Tien-I BAO