Patents by Inventor Lu Xiao Yu

Lu Xiao Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12068233
    Abstract: Provided are an adapter board and a method for forming the same, a packaging method, and a package structure. One form of a method for forming an adapter board includes: providing a base, including an interconnect region and a capacitor region, the base including a front surface and a rear surface that are opposite each other; etching the front surface of the base, to form a first trench in the base of the interconnect region and form a second trench in the base of the capacitor region; forming a capacitor in the second trench; etching a partial thickness of the base under the first trench, to form a conductive via; forming a via interconnect structure in the conductive via; and thinning the rear surface of the base, to expose the via interconnect structure.
    Type: Grant
    Filed: March 21, 2023
    Date of Patent: August 20, 2024
    Assignee: Semiconductor Manufacturing North China (Beijing) Corporation
    Inventors: Cai Qiaoming, Yang Lie Yong, Chen Wei, Lu Xiao Yu
  • Publication number: 20230223329
    Abstract: Provided are an adapter board and a method for forming the same, a packaging method, and a package structure. One form of a method for forming an adapter board includes: providing a base, including an interconnect region and a capacitor region, the base including a front surface and a rear surface that are opposite each other; etching the front surface of the base, to form a first trench in the base of the interconnect region and form a second trench in the base of the capacitor region; forming a capacitor in the second trench; etching a partial thickness of the base under the first trench, to form a conductive via; forming a via interconnect structure in the conductive via; and thinning the rear surface of the base, to expose the via interconnect structure.
    Type: Application
    Filed: March 21, 2023
    Publication date: July 13, 2023
    Applicant: Semiconductor Manufacturing North China (Beijing) Corporation
    Inventors: Cai Qiaoming, Yang Lie Yong, Chen Wei, Lu Xiao Yu
  • Patent number: 11637059
    Abstract: Provided are an adapter board and a method for forming the same, a packaging method, and a package structure. One form of a method for forming an adapter board includes: providing a base, including an interconnect region and a capacitor region, the base including a front surface and a rear surface that are opposite each other; etching the front surface of the base, to form a first trench in the base of the interconnect region and form a second trench in the base of the capacitor region; forming a capacitor in the second trench; etching a partial thickness of the base under the first trench, to form a conductive via; forming a via interconnect structure in the conductive via; and thinning the rear surface of the base, to expose the via interconnect structure.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: April 25, 2023
    Assignee: SEMICONDUCTOR MANUFACTURING NORTH CHINA (BEIJING) CORPORATION
    Inventors: Cai Qiaoming, Yang Lie Yong, Chen Wei, Lu Xiao Yu
  • Publication number: 20210398892
    Abstract: Provided are an adapter board and a method for forming the same, a packaging method, and a package structure. One form of a method for forming an adapter board includes: providing a base, including an interconnect region and a capacitor region, the base including a front surface and a rear surface that are opposite each other; etching the front surface of the base, to form a first trench in the base of the interconnect region and form a second trench in the base of the capacitor region; forming a capacitor in the second trench; etching a partial thickness of the base under the first trench, to form a conductive via; forming a via interconnect structure in the conductive via; and thinning the rear surface of the base, to expose the via interconnect structure.
    Type: Application
    Filed: January 22, 2021
    Publication date: December 23, 2021
    Applicant: Semiconductor Manufacturing North China (Beijing) Corporation
    Inventors: Cai Qiaoming, Yang Lie Yong, Chen Wei, Lu Xiao Yu